Patents by Inventor Simon van Haastert

Simon van Haastert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR PROCESSING APPARATUS
    Publication number: 20260110083
    Abstract: A semiconductor processing apparatus is disclosed. The semiconductor processing apparatus comprises a process chamber configured to receive a plurality of substrates; at least one accumulator vessel in fluid communication with the process chamber, configured to store a precursor in gas form; and at least two solid state precursor storage vessels, each being configured to receive a precursor in gas form, to cause said received gas form precursor to be converted to a solid state inside the respective solid state precursor storage vessel, and to cause said solid state precursor to be converted to gas phase. Each of the at least two solid state precursor storage vessels are in fluid communication with the at least one accumulator vessel so as to allow provision of precursor in gas form to the accumulator vessel. The at least one accumulator vessel comprises an actuatable element configured to cause an internal volume of the at least one accumulator vessel to be changed upon actuation.
    Type: Application
    Filed: October 15, 2025
    Publication date: April 23, 2026
    Inventors: Alessandro Viva, Ioannis Giannakis, Panagiota Arnou, Lucian Jdira, Radko Gerard Bankras, Riza Yukananto, Davide Proserpio, Herbert Terhorst, Theodorus G.M. Oosterlaken, Simon van Haastert, Jeroen de Jonge, Bert Jongbloed, Chaggai Shmuel Ganani, Nimit Kothari
  • SEMICONDUCTOR PROCESSING APPARATUS
    Publication number: 20260110089
    Abstract: A semiconductor processing apparatus is disclosed. The semiconductor processing apparatus comprises a process chamber configured to receive a plurality of substrates; an accumulator vessel in fluid communication with the process chamber, configured to store a precursor in gas form; and at least two solid state precursor storage vessels, each being configured to receive a precursor in gas form, to cause said received gas form precursor to be converted to a solid state inside the respective solid state precursor storage vessel, and to cause said solid state precursor to be converted to gas phase. Each of the at least two solid state precursor storage vessels are in fluid communication with the accumulator vessel.
    Type: Application
    Filed: October 15, 2025
    Publication date: April 23, 2026
    Inventors: Lucian Jdira, Radko Gerard Bankras, Riza Yukananto, Davide Proserpio, Herbert Terhorst, Theodorus G.M. Oosterlaken, Simon van Haastert, Fatma Trabelsi, Bert Jongbloed, Werner Knaepen
  • PRECURSOR SUPPLY VESSEL
    Publication number: 20260028719
    Abstract: A precursor supply vessel is disclosed. The precursor supply vessel comprises a top wall, a bottom wall, and a side wall; a top wall heater configured and arranged to heat the top wall, a bottom wall heater configured and arranged to heat the bottom wall, and a side wall heater configured and arranged to heat the side wall. Each of the heaters is independently controllable.
    Type: Application
    Filed: July 23, 2025
    Publication date: January 29, 2026
    Inventors: Radko Bankras, Lucian Jdira, Simon van Haastert, Davide Proserpio, Frans Wiegers