Abstract: A vacuum pumping system includes an oil-lubricated rotary vacuum pump, an electric motor driving the pump and a gas ballast arrangement supplying the pump with gas and fluidically coupled with the motor for sucking oil, leaked from the pump into the motor, back into the pump. The fluidic coupling is achieved by means of a leaked oil recovery unit that is housed in a region of an internal chamber of the motor where ballast gas and leaked oil are present and that establishes communication between the region of the internal chamber of the motor and the pumping chamber.

Abstract: A bearing allows accurate monitoring of bearing conditions and includes a printed circuit board, which is fitted to the bearing and on which one or more sensors are preassembled. The bearing facilitates removal and replacement operations and includes a first electrical cable and a second electrical cable removably connected to each other. The bearing is particularly suitable for applications to rotary vacuum pumps, especially turbomolecular pumps, in which the bearing is under vacuum conditions and the rotating shaft rotates at very high speed, so that high precision in the design and operation of the bearing is required and risks of contamination and/or of losing vacuum tightness must be carefully avoided.

Abstract: A vacuum pumping system includes an oil-lubricated rotary vacuum pump, an electric motor driving the pump and a gas ballast arrangement supplying the pump with gas and fluidically coupled with the motor for sucking oil, leaked from the pump into the motor, back into the pump. The fluidic coupling is achieved by means of a leaked oil recovery unit that is housed in a region of an internal chamber of the motor where ballast gas and leaked oil are present and that establishes communication between the region of the internal chamber of the motor and the pumping chamber.

Abstract: A vacuum pump includes a housing, a rotatable shaft extending in an axial direction within the housing, a first pumping arrangement including a first stator arrangement and a first rotor arrangement, and a second pumping arrangement including a second stator arrangement and a second rotor arrangement. The vacuum pump further includes a spacer arranged between the first pumping arrangement and the second pumping arrangement. The spacer is coupled between the first stator arrangement and the second stator arrangement and is configured to provide a defined elasticity in the axial direction allowing an elastic deformation of the spacer in the axial direction.

Abstract: A vacuum pump includes a housing, a rotatable shaft extending in an axial direction within the housing, a first pumping arrangement including a first stator arrangement and a first rotor arrangement, and a second pumping arrangement including a second stator arrangement and a second rotor arrangement. The vacuum pump further includes a spacer arranged between the first pumping arrangement and the second pumping arrangement. The spacer is coupled between the first stator arrangement and the second stator arrangement and is configured to provide a defined elasticity in the axial direction allowing an elastic deformation of the spacer in the axial direction.