Abstract: A method and a system for determining relative position of an element of an optical system of an assembly for processing or measuring an object along a measurement line, involve generating a measurement beam and a reference beam of low coherence optical radiation. The measurement and reference beams, alternately or in combination, have a main beam and a multiplexed additional beam. The measurement beam, led toward the element of the optical system, and back-reflected, is superimposed on the reference beam in a region of common incidence of an interferometric optical sensor arrangement. Position or frequency of a main interference fringe pattern and an additional interference fringe pattern is detected.

Abstract: A method for determining a separation distance between a working head in a machine for laser processing a material and a surface of the material includes generating a measurement beam of low coherence optical radiation, leading the measurement beam towards the material and a reflected or diffused measurement beam towards an optical interferometric sensor arrangement in a first direction of incidence, generating a reference beam of low coherence optical radiation, leading the reference beam towards the optical interferometric sensor arrangement in a second direction of incidence superimposing the measurement and reference beams on a common region of incidence, detecting a position of a pattern of interference fringes between the measurement and reference beams on the common region of incidence, and determining a difference in optical length between the measurement and reference optical paths based on the position of the pattern of interference fringes along an illumination axis.

Abstract: A method for determining local position of an optical element associated with an optical path for transporting a laser beam in a working head of a machine for laser processing a material, includes generating a measurement beam of low coherence optical radiation traveling a measurement optical path, leading the measurement beam towards the optical element and the reflected or diffused measurement beam towards an optical interferometric sensor arrangement, generating a reference beam of low coherence optical radiation traveling a reference optical path and leading the reference beam towards the interferometric optical sensor arrangement, superimposing the measurement and reference beams on a common region of incidence, detecting a position of a pattern of interference fringes between the measurement and reference beams, and determining a difference in optical length between the measurement and reference optical paths as a function of the position of the interference pattern along an illumination axis, or of the

Abstract: Method and system for determining separation distance between an object and a processing or measuring tool involve generating a measurement beam of low coherence optical radiation, leading the measurement beam towards the object and the reflected measurement beam towards an optical interferometric sensor assembly in a first direction of incidence, generating a reference beam of low coherence optical radiation, and leading the reference beam towards the optical interferometric sensor assembly in a second direction of incidence, superimposing the measurement and reference beams on a common region of incidence, detecting position of a pattern of interference fringes between the measurement and reference beams on the region of incidence, and determining difference in optical length between a measurement optical path and a reference optical path on position of the pattern of interference fringes along an illumination axis to determine current separation distance between the processing or measuring tool and the obj

Abstract: A combined optical system for determining temperature of the surface of an object or material and its distance with respect to a predetermined reference point associated with the system includes an optical radiation source emitting optical probe radiation at a predetermined wavelength or in a predetermined wavelength range, a source control unit controlling switching of the source from an operative condition, in which it emits optical probe radiation, to an inoperative condition, in which it does not emit optical probe radiation, optical detectors acquiring scattered optical radiation and thermally emitted optical radiation from the surface of the object or material, and a processing unit determining the distance of the surface of the object/material based on scattered optical probe radiation when the source is operative, and the local temperature of the surface of the object/material on the basis of thermally emitted optical radiation when the source is inoperative.

Abstract: Method and system for determining separation distance between an object and a processing or measuring tool involve generating a measurement beam of low coherence optical radiation, leading the measurement beam towards the object and the reflected measurement beam towards an optical interferometric sensor assembly in a first direction of incidence, generating a reference beam of low coherence optical radiation, and leading the reference beam towards the optical interferometric sensor assembly in a second direction of incidence, superimposing the measurement and reference beams on a common region of incidence, detecting position of a pattern of interference fringes between the measurement and reference beams on the region of incidence, and determining difference in optical length between a measurement optical path and a reference optical path on position of the pattern of interference fringes along an illumination axis, indicative of a difference between (a) current separation distance between the processing or