Patents by Inventor Sinar JULIANA

Sinar JULIANA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stage system and metrology tool
    Patent number: 10809634
    Abstract: Disclosed is a stage system and metrology apparatus comprising at least one such stage system. The stage system comprises a stage carrier for holding an object and a stage carrier positioning actuator for displacing the stage carrier. The stage system also comprises a balance mass to counteract a displacement of the stage carrier, and a balance mass positioning actuator for displacing the balance mass. A cable arrangement is connected to the stage carrier for the supply of at least power to said stage carrier. The stage system is operable to apply a compensatory feed-forward force to the balance mass which compensates for a cable arrangement force exerted by the cable arrangement.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: October 20, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Peter Paul Hempenius, Marcel Koenraad Marie Baggen, Thomas Jan De Hoog, Sinar Juliana, Henricus Martinus Johannes Van De Groes
  • Stage System and Metrology Tool
    Publication number: 20180267410
    Abstract: Disclosed is a stage system and metrology apparatus comprising at least one such stage system. The stage system comprises a stage carrier for holding an object and a stage carrier positioning actuator for displacing the stage carrier. The stage system also comprises a balance mass to counteract a displacement of the stage carrier, and a balance mass positioning actuator for displacing the balance mass. A cable arrangement is connected to the stage carrier for the supply of at least power to said stage carrier. The stage system is operable to apply a compensatory feed-forward force to the balance mass which compensates for a cable arrangement force exerted by the cable arrangement.
    Type: Application
    Filed: March 14, 2018
    Publication date: September 20, 2018
    Applicant: ASML Netherlands B.V.
    Inventors: Peter Paul HEMPENIUS, Marcel Koenraad Marie BAGGEN, Thomas Jan DE HOOG, Sinar JULIANA, Henricus Martinus Johannes VAN DE GROES