Patents by Inventor Singo Okubo

Singo Okubo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METAL HETEROCYCLIC COMPOUNDS FOR DEPOSITION OF THIN FILMS
    Publication number: 20090321733
    Abstract: Methods and compositions for depositing a metal containing film on a substrate are disclosed. A reactor and at least one substrate disposed in the reactor are provided. A metal containing precursor is provided and introduced into the reactor, which is maintained at a temperature of at least 100° C. A metal is deposited on to the substrate through a deposition process to form a thin film on the substrate.
    Type: Application
    Filed: June 25, 2009
    Publication date: December 31, 2009
    Inventors: Julien GATINEAU, Kazutaka Yanagita, Singo Okubo