Abstract: A liquid flow distribution apparatus for forming highly uniform liquid layers on substrates without stagnation within a flow distribution cavity of the apparatus. A primary cavity has a primary inlet means and a plurality of secondary inlet conduits which terminate in angled secondary ports in the cavity wall. Each of the secondary ports is angled away from the primary inlet means. The apparatus can be used under varying rheological conditions.

Abstract: A liquid distribution device and method for distributing liquid uniformly is disclosed. A coating liquid is supplied to a distribution cavity from both sides of the cavity through a delivery line. The cavity is a slot which expands from the length at the liquid entrance of the cavity to a longer length at the cavity exit. The two streams of liquid impinge against each other inside the cavity and spread out along the contour of the cavity. This liquid distribution system eliminates recirculation regions and does not experience problems with variable residence time and distribution across the slot.