Patents by Inventor Sinha Harsh

Sinha Harsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for defect classification
    Patent number: 10482590
    Abstract: Defect classification includes acquiring one or more images of a specimen, receiving a manual classification of one or more training defects based on one or more attributes of the one or more training defects, generating an ensemble learning classifier based on the received manual classification and the attributes of the one or more training defects, generating a confidence threshold for each defect type of the one or more training defects based on a received classification purity requirement, acquiring one or more images including one or more test defects, classifying the one or more test defects with the generated ensemble learning classifier, calculating a confidence level for each of the one or more test defects with the generated ensemble learning classifier and reporting one or more test defects having a confidence level below the generated confidence threshold via the user interface device for manual classification.
    Type: Grant
    Filed: December 12, 2017
    Date of Patent: November 19, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Li He, Chien-Huei Adam Chen, Sankar Venkataraman, John R. Jordan, Huajun Ying, Sinha Harsh
  • Method and System for Defect Classification
    Publication number: 20180114310
    Abstract: Defect classification includes acquiring one or more images of a specimen, receiving a manual classification of one or more training defects based on one or more attributes of the one or more training defects, generating an ensemble learning classifier based on the received manual classification and the attributes of the one or more training defects, generating a confidence threshold for each defect type of the one or more training defects based on a received classification purity requirement, acquiring one or more images including one or more test defects, classifying the one or more test defects with the generated ensemble learning classifier, calculating a confidence level for each of the one or more test defects with the generated ensemble learning classifier and reporting one or more test defects having a confidence level below the generated confidence threshold via the user interface device for manual classification.
    Type: Application
    Filed: December 12, 2017
    Publication date: April 26, 2018
    Inventors: Li He, Chien-Huei Adam Chen, Sankar Venkataraman, John R. Jordan, Huajun Ying, Sinha Harsh
  • Method and System for Defect Classification
    Publication number: 20160328837
    Abstract: Defect classification includes acquiring one or more images of a specimen, receiving a manual classification of one or more training defects based on one or more attributes of the one or more training defects, generating an ensemble learning classifier based on the received manual classification and the attributes of the one or more training defects, generating a confidence threshold for each defect type of the one or more training defects based on a received classification purity requirement, acquiring one or more images including one or more test defects, classifying the one or more test defects with the generated ensemble learning classifier, calculating a confidence level for each of the one or more test defects with the generated ensemble learning classifier and reporting one or more test defects having a confidence level below the generated confidence threshold via the user interface device for manual classification.
    Type: Application
    Filed: June 24, 2015
    Publication date: November 10, 2016
    Inventors: Li He, ChienHuei Adam Chen, Sankar Venkataraman, John R. Jordan, III, Huajun Ying, Sinha Harsh