Patents by Inventor Sinich IMADA

Sinich IMADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SiH4 SOAK FOR LOW HYDROGEN SIN DEPOSITION TO IMPROVE FLASH MEMORY DEVICE PERFORMANCE
    Publication number: 20110266609
    Abstract: Prior to deposition of a silicon nitride (SiN) layer on a structure, a non-plasma enhanced operation is undertaken wherein the structure is exposed to silane (SiH4) flow, reducing the overall exposure of the structure to hydrogen radicals. This results in the silicon nitride being strongly bonded to the structure and in improved performance.
    Type: Application
    Filed: June 21, 2011
    Publication date: November 3, 2011
    Inventors: Sung Jin KIM, Alexander NICKEL, Minh-Van NGO, Hieu Trung PHAM, Masato TSUBOI, Sinich IMADA