Patents by Inventor Sinji Kubota

Sinji Kubota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6181921
    Abstract: The present invention provides a system for a moving body which enables a user to know a receivable broadcast station at the current position in real time and to select smoothly a desired broadcast station in a receiver even in an unfamiliar area. This system includes a broadcast station data memory that stores the channel data of a receivable broadcast station for each area, and a main processing circuit which is responsive to the vehicle's current position sensed by a coordinate computing unit for referring to the channel data and for showing the channel data of a receivable broadcast station at the current position on a display.
    Type: Grant
    Filed: April 17, 1996
    Date of Patent: January 30, 2001
    Assignee: Seiko Epson Corporation
    Inventors: Masanori Konisi, Sinji Kubota
  • Patent number: 5888338
    Abstract: The invention provides a novel magnetron plasma processing apparatus comprising the following, a vacuum chamber storing an etching object, the first electrode which is provided in the vacuum chamber and holds the etching object, the second electrode which is disposed in opposition from the first electrode, where the first and second electrodes are in parallel with each other, a gas-supply unit feeding etching gas to the vacuum chamber, a magnetic-field generating means which is disposed on the part opposite from the first electrode in opposition from the second electrode, and a power-supply unit which feeds power to either of these first and second electrodes and generates discharge between these parallel electrodes. Magnetic-field generating means is provided with a magnetic block whose both-end surfaces are provided with magnetic poles having polarity inverse from each other, and in addition, a plane recess opposite from the second electrode is provided between both-end surfaces of the magnetic block.
    Type: Grant
    Filed: March 27, 1997
    Date of Patent: March 30, 1999
    Assignees: Tokyo Electron Limited, Kabushiki Kaisha Toshiba
    Inventors: Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka, Isahiro Hasegawa, Haruo Okano, Katsuya Okumura, Yukimasa Yoshida
  • Patent number: 5660671
    Abstract: A magnetron plasma processing apparatus includes, a vacuum chamber storing an etching object, a first electrode which is provided in the vacuum chamber and holds the etching object, a second electrode which is disposed in opposition from the first electrode and parallel with the first electrode. A gas-supply unit feeding etching gas to the vacuum chamber while, a magnetic-field generating means is disposed on the part opposite from the first electrode in opposition from the second electrode, and a power-supply unit feeds power to either the first or second electrodes and generates discharge between the electrodes. The magnetic-field generating means is provided with a magnetic block whose both-end surfaces are provided with magnetic poles having polarity inverse from each other, and in addition, a plane recess opposite from the second electrode is provided between both-end surfaces of the magnetic block.
    Type: Grant
    Filed: June 28, 1994
    Date of Patent: August 26, 1997
    Assignees: Tokyo Electron Limited, Kabushiki Kaisha Toshiba
    Inventors: Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka, Isahiro Hasegawa, Haruo Okano, Katsuya Okumura, Yukimasa Yoshida
  • Patent number: 5376211
    Abstract: A magnetron plasma processing apparatus including a vacuum chamber storing an object to be etched, a first electrode provided in the vacuum chamber to hold the object, a second electrode disposed to one side of the first electrode, where the first and second electrodes are in parallel with each other, a gas-supply unit feeding etching gas to the vacuum chamber, a magnetic-field generating means including a magnetic block disposed outside the chamber on the opposite side of the second electrode and rotatable about an axis normal to the object held by the first electrode, and a power-supply unit which feeds power to either of the first and second electrodes and generates discharge between these parallel electrodes. The magnetic block has end surfaces provided with magnetic poles having polarity inverse from each other, and in addition, a plane recess opposite from the second electrode is provided between the magnetic poles.
    Type: Grant
    Filed: September 27, 1991
    Date of Patent: December 27, 1994
    Assignees: Tokyo Electron Limited, Kabushiki Kaisha Toshiba
    Inventors: Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka, Isahiro Hasegawa, Haruo Okano, Katsuya Okumura, Yukimasa Yoshida