Patents by Inventor Sinji Ueebisu

Sinji Ueebisu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate cleaning apparatus and substrate cleaning method using the same
    Patent number: 7806986
    Abstract: Disclosed is a substrate cleaning apparatus including a brush cleaning unit which cleans a substrate by making a roll brush in contact with a surface of the substrate, and a transporting unit which conveys the substrate. The roll brush includes a bristle. At least one of a diameter of the roll brush, stiffness of the bristle, and density of the bristle becomes larger from an end portion of the roll brush to a central portion thereof.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: October 5, 2010
    Assignee: NEC LCD Technologies, Ltd.
    Inventor: Sinji Ueebisu
  • Substrate cleaning apparatus and substrate cleaning method using the same
    Publication number: 20080066780
    Abstract: Disclosed is a substrate cleaning apparatus including a brush cleaning unit which cleans a substrate by making a roll brush in contact with a surface of the substrate, and a transporting unit which conveys the substrate. The roll brush includes a bristle. At least one of a diameter of the roll brush, stiffness of the bristle, and density of the bristle becomes larger from an end potion of the roll brush to a central portion thereof.
    Type: Application
    Filed: September 11, 2007
    Publication date: March 20, 2008
    Applicant: NEC LCD TECHNOLOGIES, LTD.
    Inventor: Sinji Ueebisu