Patents by Inventor SIVAKAMI SUBRAMANIAN

SIVAKAMI SUBRAMANIAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TRENCH ISOLATION STRUCTURES AND METHODS OF MAKING THEREOF
    Publication number: 20240014066
    Abstract: A trench isolation structure and method of making the same is provided. The trench isolation structure comprises a trench in a substrate, the trench having a bottom surface and sidewalls. A polycrystalline material is at least partially in the trench and an amorphous layer is over the polycrystalline material.
    Type: Application
    Filed: July 6, 2022
    Publication date: January 11, 2024
    Inventors: HUNG CHANG LIAO, SHIANG YANG ONG, JIANBO ZHOU, ZHONGXIU YANG, SIVAKAMI SUBRAMANIAN