Patents by Inventor Sivakumar Krithivasan

Sivakumar Krithivasan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030051738
    Abstract: A process for cleaning an integrated circuit package surface, comprising the steps of introducing the integrated circuit inside a plasma chamber; and of exposing the integrated circuit to a physical plasma obtained starting from a gas consisting of pure argon or any other noble gas having, in the plasma state, the behavior of a halogen, for example helium. The argon pla sma is obtained using the following energization parameters: energization time, 12-13 seconds; energization power, 140-160 W; plasma chamber pressure, 190-210 millitorr; and energization frequency, between 1 kHz and 100 GHz.
    Type: Application
    Filed: July 24, 2001
    Publication date: March 20, 2003
    Applicant: STMicroelectronics S.r.l.
    Inventors: Andrea Cigada, Pierre Yves Shechter, Sivakumar Krithivasan