Abstract: A gas diffuser plate in a cyclic deposition chamber is disclosed. The gas diffuser plate as fabricated comprises a substrate diffuser plate having a substrate emissivity and a coating formed on the substrate diffuser plate. The gas diffuser plate having the substrate diffuser plate coated with the coating has an emissivity higher than the substrate emissivity. The coating comprises a first layer formed on the substrate diffuser plate and comprising a first material configured to modulate the emissivity of the gas diffuser plate, and a second layer comprising a second corrosion-resistant material. The first material comprises titanium nitride oxide (TiNxOy). The emissivity of the gas diffuser plate is at least partially based on the ratio of nitrogen and oxygen in TiNxOy.

Abstract: A method for sensing two or more touch inputs includes receiving sensing signals of the touch inputs from plural sensing electrodes, calculating a value dependent on a distance between the touch inputs based on the received sensing signals, and determining the existence of the two or more touch inputs if the calculated value is more than or equal to a threshold value. The plural sensor electrodes include a pair of sensing electrodes that correspond to same coordinates on a first axis, and the sensing signals are received from the pair of sending electrodes along the first axis.

Abstract: A method for sensing two or more touch inputs includes receiving sensing signals of the touch inputs from plural sensing electrodes, calculating a value dependent on a distance between the touch inputs based on the received sensing signals, and determining the existence of the two or more touch inputs if the calculated value is more than or equal to a threshold value. The plural sensor electrodes include a pair of sensing electrodes that correspond to same coordinates on a first axis, and the sensing signals are received from the pair of sending electrodes along the first axis.