Patents by Inventor Si-woong WOO

Si-woong WOO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR MONITORING SUBSTRATE, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME, AND SUBSTRATE PROCESS SYSTEM USING THE SAME
    Publication number: 20230115922
    Abstract: A method for fabricating a semiconductor device includes loading a substrate into a process chamber, processing the substrate in the process chamber, using a plasma generated inside the process chamber, receiving a plasma light emitted from the plasma, selecting a target light from the plasma light, such that the target light is related to a surface condition of the substrate, and analyzing an intensity of the target light over time to monitor the surface condition of the substrate.
    Type: Application
    Filed: May 20, 2022
    Publication date: April 13, 2023
    Inventors: Yong In LEE, In Hwa BAEK, Se-Hoon JANG, Dong Gap SHIN, Young Ho KIM, Seung Dae SEOK, Si Woong WOO, Jun Gyu LEE
  • Chuck-driving device and substrate-processing apparatus
    Patent number: 10635006
    Abstract: A chuck-driving device includes a base extending in first and second directions. The second direction crosses the first direction. The chuck-driving device further includes a slider positioned on the base and configured to move in a third direction substantially perpendicular to the first and second directions, and a pneumatic cylinder positioned on the base and to support the slider in the third direction. The chuck-driving additionally includes a motor assembly positioned on the base, around the pneumatic cylinder, and configured to drive the slider in the third direction. The motor assembly includes a coil base having a hollow portion disposed around sides of the pneumatic cylinder, a coil assembly positioned on the coil base and disposed around the sides of the pneumatic cylinder, and a magnet assembly adjacent to a part of the coil assembly.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: April 28, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang-joon Hong, Jung-jae Kim, Sang-hyun Park, Ono Kazuya, Si-woong Woo
  • CHUCK-DRIVING DEVICE AND SUBSTRATE-PROCESSING APPARATUS
    Publication number: 20200089123
    Abstract: A chuck-driving device includes a base extending in first and second directions. The second direction crosses the first direction. The chuck-driving device further includes a slider positioned on the base and configured to move in a third direction substantially perpendicular to the first and second directions, and a pneumatic cylinder positioned on the base and to support the slider in the third direction. The chuck-driving additionally includes a motor assembly positioned on the base, around the pneumatic cylinder, and configured to drive the slider in the third direction. The motor assembly includes a coil base having a hollow portion disposed around sides of the pneumatic cylinder, a coil assembly positioned on the coil base and disposed around the sides of the pneumatic cylinder, and a magnet assembly adjacent to a part of the coil assembly.
    Type: Application
    Filed: April 22, 2019
    Publication date: March 19, 2020
    Inventors: SANG-JOON HONG, Jung-jae KIM, Sang-hyun PARK, Ono KAZUYA, Si-woong WOO