Patents by Inventor Siyoukichi Kaneko

Siyoukichi Kaneko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for reacting a semiconductor wafer with steam
    Patent number: 4546726
    Abstract: An apparatus for reacting a semiconductor wafer with steam includes a reaction tube and a heater for heating the reaction tube. The reaction tube is divided into three chambers by partition plates having a through hole. Pure water is directly supplied into the most upstream chamber and is evaporated into steam. The steam enters the second chamber and further heated therein into superheated steam. The superheated steam enters the most downstream chamber in which a semiconductor wafer or wafers are placed, and is heated sufficient for reaction with the wafer to form an oxide film thereon.
    Type: Grant
    Filed: October 26, 1983
    Date of Patent: October 15, 1985
    Assignee: Tokyo Shibaura Denki Kabushiki Kaisha
    Inventors: Syuichi Nagasaka, Siyoukichi Kaneko