Patents by Inventor Sjoerd N. L. Donders

Sjoerd N. L. Donders has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask clamping apparatus, e.g. for a lithographic apparatus
    Patent number: 6480260
    Abstract: An apparatus for supporting a mask comprises a pair of members. The mask held against each member by a vacuum arrangement which prevents relative motion between the mask and members. The members are compliant such that they accommodate flatness variations in the mask but without deforming the mask.
    Type: Grant
    Filed: November 27, 2000
    Date of Patent: November 12, 2002
    Assignee: ASML Netherlands B.V.
    Inventors: Sjoerd N. L. Donders, Tjarko A. R. van Empel
  • Mask for clamping apparatus, e.g. for a lithographic apparatus
    Patent number: RE41307
    Abstract: An apparatus for supporting a mask comprises a pair of members. The mask held against each member by a vacuum arrangement which prevents relative motion between the mask and members. The members are compliant such that they accommodate flatness variations in the mask but without deforming the mask.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: May 4, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Sjoerd N .L. Donders, Tjarko A. R. van Empel