Abstract: A method and system for inspecting a surface. A lighting device is configured to provide a light beam focused at a focal point at a distance from a surface to cause a shockwave reaching the surface for dislodging particles from the surface and causing the particles dislodged from the surface to become airborne particles. A particle detector is configured to detect the airborne particles dislodged by the shockwave from the surface. For example, this can be used for quantifying a cleanliness and/or contamination of the surface by surface-bound nanoparticles, which were at least present on the surface prior to the shockwave, based on a detected amount of the airborne particles, after the shockwave is applied.

Abstract: The optical inspection device is used for inspecting a planar object surface for the presence of particles and/or defects. A light source supplies light to the planar object surface of the object at a grazing angle. An image sensor receives light due to scattering from particles and defects on the object surface. The optical axis of the objective is at non-zero angles with the normal to the planar object surface and a direction or directions of specular reflection of the light from the light source by the planar object surface. A detection surface of the image detection device and the optical axis of the objective is in a Scheimpflug configuration. The light source and image sensor are located outside a space extending perpendicularly from the planar object surface, on opposite sides of that space. The image sensor comprises an objective and an image detection device. The device may further comprise a microscope or spectrometer to access the object surface through said space.

Abstract: The optical inspection device is used for inspecting a planar object surface for the presence of particles and/or defects. A light source supplies light to the planar object surface of the object at a grazing angle. An image sensor receives light due to scattering from particles and defects on the object surface. The optical axis of the objective is at non-zero angles with the normal to the planar object surface and a direction or directions of specular reflection of the light from the light source by the planar object surface. A detection surface of the image detection device and the optical axis of the objective is in a Scheimpflug configuration. The light source and image sensor are located outside a space extending perpendicularly from the planar object surface, on opposite sides of that space. The image sensor comprises an objective and an image detection device. The device may further comprise a microscope or spectrometer to access the object surface through said space.

Abstract: The invention is directed to a method for removing particulate contaminants from the backside of a wafer or reticle, and to a cleaning substrate for use in such method. In the method of the invention particulate contaminants are removed from the backside of a wafer or reticle with a cleaning substrate. The cleaning substrate comprises protrusions and a tacky layer between the protrusions. The method comprises contacting the backside of the wafer or reticle with the protrusions of the cleaning substrate while maintaining a distance between the wafer or reticle and the tacky layer, the distance being in the range of 1-10 ?m.

Abstract: The invention is directed to a method for removing particulate contaminants from the backside of a wafer or reticle, and to a cleaning substrate for use in such method. In the method of the invention particulate contaminants are removed from the backside of a wafer or reticle with a cleaning substrate. The cleaning substrate comprises protrusions and a tacky layer between the protrusions. The method comprises contacting the backside of the wafer or reticle with the protrusions of the cleaning substrate while maintaining a distance between the wafer or reticle and the tacky layer, the distance being in the range of 1-10 ?m.

Abstract: The invention provides an optoelectric device, in particular an organic light emitting diode device comprising a substrate, a first electrode applied on the substrate, a second electrode, a layer of an organic light emitting material which is arranged in between the first electrode and the second electrode, and a multilayer seal applied onto the second electrode which multilayer seal comprises at least one layer of a high density material and at least one layer of an organic material in which organic material a moisture scavenging agent has been incorporated, which moisture scavenging agent comprises an organic composition that does not generate an acidic proton when subjected to hydrolysis. The invention also relates to an article comprising said organic light emitting device, and a method for preparing said device.

Abstract: The invention provides an optoelectric device, in particular an organic light emitting diode device comprising a substrate, a first electrode applied on the substrate, a second electrode, a layer of an organic light emitting material which is arranged in between the first electrode and the second electrode, and a multilayer seal applied onto the second electrode which multilayer seal comprises at least one layer of a high density material and at least one layer of an organic material in which organic material a moisture scavenging agent has been incorporated, which moisture scavenging agent comprises an organic composition that does not generate an acidic proton when subjected to hydrolysis. The invention also relates to an article comprising said organic light emitting device, and a method for preparing said device.