Patents by Inventor Slvakumar Dhandapani

Slvakumar Dhandapani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PAD CONDITIONING FORCE MODELING TO ACHIEVE CONSTANT REMOVAL RATE
    Publication number: 20130122783
    Abstract: A method and apparatus for conditioning a polishing pad in a CMP system is provided. In one embodiment, a method for conditioning a polishing pad includes applying a down force to the conditioning disk that urges the conditioning disk against the polishing pad, measuring a torque required to sweep the conditioning disk across the polishing pad, determining a change in down force by comparing the measured torque to a model force profile (MFP), and adjusting the down force that the conditioning disk applies against the polishing pad in response to the determined change.
    Type: Application
    Filed: April 13, 2011
    Publication date: May 16, 2013
    Applicant: APPLIED MATERIALS, INC
    Inventors: Gregory E. Menk, Stan D. Tsai, Sang J. Cho, Slvakumar Dhandapani, Christopher D. Cocca, Jason G. Fung, Shou-Sung Chang, Charles C. Garretson