Patents by Inventor Snag-Mun Chon

Snag-Mun Chon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Resist and etching by-product removing composition and resist removing method using the same
    Publication number: 20040142836
    Abstract: A resist removing composition having a superior capability for removing a resist, polymer, organometallic polymer and etching by-products such as metal oxide, which does not attack underlying layers exposed to the composition and which does not leave residues after a rinsing step. The resist removing composition contains alkoxy N-hydroxyalkyl alkanamide and a swelling agent.
    Type: Application
    Filed: December 19, 2003
    Publication date: July 22, 2004
    Inventors: Dong-Jin Park, Kyung-Dae Kim, Snag-Mun Chon, Jin-Ho Hwang, Il-Hyun Sohn, Sang-Oh Park, Pil-Kwon Jun