Patents by Inventor So Hyung Jeong

So Hyung Jeong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230207288
    Abstract: The inventive concept provides an apparatus for treating a substrate. A substrate treatment apparatus according to an embodiment includes a housing having a treatment space in which the substrate is treated, a support unit that supports the substrate in the treatment space, and a gas supply unit that supplies a gas to the treatment space, wherein a heat transfer flow path that supplies a heat transfer medium to the substrate supported by the support unit, a pin hole defining an elevation path of a lift pin that elevates the substrate supported by the support unit, and a connection portion allowing the heat transfer flow path and the pin hole to be in communication with each other are formed inside the support unit, and the connection portion includes a porous structure.
    Type: Application
    Filed: December 28, 2022
    Publication date: June 29, 2023
    Applicant: Semes Co. Ltd.
    Inventors: Sang-Kee LEE, So Hyung Jeong