Abstract: A three-dimensional direction drift control apparatus and a microscope apparatus that correct misalignment of a relative position between an object lens and a sample. A near-infrared light emitted from a light source is irradiated onto a surface of a glass cover holding a sample on a stage. When the near-infrared light is irradiated onto the glass cover, a regular reflection light and scattered light of the near-infrared light are generated, and the regular reflection light and the scattered light enter a half-mirror via lenses from an objective lens to an offset lens group. A clamp processing unit detects misalignment in the lateral direction of the object lens with respect to the sample based on the image of the scattered light, which has been reflected by the half-mirror and entered a two-dimensional photoelectric converter, and controls a drive unit according to this detection result, whereby the stage is moved.

Abstract: A three-dimensional direction drift control apparatus and a microscope apparatus that correct misalignment of a relative position between an object lens and a sample. A near-infrared light emitted from a light source is irradiated onto a surface of a glass cover holding a sample on a stage. When the near-infrared light is irradiated onto the glass cover, a regular reflection light and scattered light of the near-infrared light are generated, and the regular reflection light and the scattered light enter a half-mirror via lenses from an objective lens to an offset lens group. A clamp processing unit detects misalignment in the lateral direction of the object lens with respect to the sample based on the image of the scattered light, which has been reflected by the half-mirror and entered a two-dimensional photoelectric converter, and controls a drive unit according to this detection result, whereby the stage is moved.

Abstract: A three-dimensional direction drift control apparatus and a microscope apparatus that correct misalignment of a relative position between an object lens and a sample. A near-infrared light emitted from a light source is irradiated onto a surface of a glass cover holding a sample on a stage. When the near-infrared light is irradiated onto the glass cover, a regular reflection light and scattered light of the near-infrared light are generated, and the regular reflection light and the scattered light enter a half-mirror via lenses from an objective lens to an offset lens group. A clamp processing unit detects misalignment in the lateral direction of the object lens with respect to the sample based on the image of the scattered light, which has been reflected by the half-mirror and entered a two-dimensional photoelectric converter, and controls a drive unit according to this detection result, whereby the stage is moved.

Abstract: A three-dimensional direction drift control apparatus and a microscope apparatus that correct misalignment of a relative position between an object lens and a sample. A near-infrared light emitted from a light source is irradiated onto a surface of a glass cover holding a sample on a stage. When the near-infrared light is irradiated onto the glass cover, a regular reflection light and scattered light of the near-infrared light are generated, and the regular reflection light and the scattered light enter a half-mirror via lenses from an objective lens to an offset lens group. A clamp processing unit detects misalignment in the lateral direction of the object lens with respect to the sample based on the image of the scattered light, which has been reflected by the half-mirror and entered a two-dimensional photoelectric converter, and controls a drive unit according to this detection result, whereby the stage is moved.