Abstract: In order to make it possible to accurately measure the HF concentration in a BHF solution in a low concentration region using a simple structure, there are provided a relationship storage unit that stores relationships between a pH of a BHF solution and an HF concentration, a pH meter that measures the pH of the BHF solution, and a concentration calculation unit that refers to relationships stored in the relationship storage unit, and calculates the HF concentration from the pH values measured by the pH meter.

Abstract: In order to make it possible to accurately measure the HF concentration in a BHF solution in a low concentration region using a simple structure, there are provided a relationship storage unit that stores relationships between a pH of a BHF solution and an HF concentration, a pH meter that measures the pH of the BHF solution, and a concentration calculation unit that refers to relationships stored in the relationship storage unit, and calculates the HF concentration from the pH values measured by the pH meter.

Abstract: The present invention improves an S/N ratio and light intensity resolution provided by an A/D converter, and an analyzer includes: a measurement cell irradiated with light during sample measurement; a dimming element irradiated with the light during reference measurement; an amplifier configured to amplify an analog light intensity signal outputted from a light detector; an A/D converter configured to convert the analog light intensity signal into a digital light intensity signal; and an arithmetic device configured to calculate absorbance using a digital sample light intensity signal outputted from the A/D converter during the sample measurement and a digital reference light intensity signal outputted from the A/D converter during the reference measurement, wherein an amplification factor of the amplifier is set such that the analog reference light intensity signal and the analog sample light intensity signal become less than or equal to a full scale of the A/D converter.

Abstract: The present invention includes: an optical fiber being provided either of between a light source and a measurement cell and between the measurement cell and a light detection part; and light path switching means adapted to achieve switching between a measurement cell passage state in which a light path formed by light transmission means passes through the measurement cell and a measurement cell non-passage state in which the light path formed by the light transmission means passes through a region different from the measurement cell, wherein calibration processing for a first calibration with a long calibration cycle is performed in the measurement cell passage state, and calibration processing for a second calibration with a short calibration cycle is performed in the measurement cell non-passage state.

Abstract: The present invention improves an S/N ratio and light intensity resolution provided by an A/D converter, and an analyzer includes: a measurement cell irradiated with light during sample measurement; a dimming element irradiated with the light during reference measurement; an amplifier configured to amplify an analog light intensity signal outputted from a light detector; an A/D converter configured to convert the analog light intensity signal into a digital light intensity signal; and an arithmetic device configured to calculate absorbance using a digital sample light intensity signal outputted from the A/D converter during the sample measurement and a digital reference light intensity signal outputted from the A/D converter during the reference measurement, wherein an amplification factor of the amplifier is set such that the analog reference light intensity signal and the analog sample light intensity signal become less than or equal to a full scale of the A/D converter.

Abstract: The present invention includes: an optical fiber being provided either of between a light source and a measurement cell and between the measurement cell and a light detection part; and light path switching means adapted to achieve switching between a measurement cell passage state in which a light path formed by light transmission means passes through the measurement cell and a measurement cell non-passage state in which the light path formed by the light transmission means passes through a region different from the measurement cell, wherein calibration processing for a first calibration with a long calibration cycle is performed in the measurement cell passage state, and calibration processing for a second calibration with a short calibration cycle is performed in the measurement cell non-passage state.

Abstract: An optical measurement device is adapted to measure characteristics of a measurement targeted fluid based on a transmitted inspection light. The device comprises a cell having an internal space for accommodating the measurement targeted fluid to flow therein and having a pair of opposing through holes for transmitting the inspection light, each of the through holes sealed with a transparent member. The device includes a projection optical system member having a port for projecting the inspection light and a light-receiving optical system member having a port for receiving the inspection light transmitted through the internal space. A base member is provided for supporting the cell, the projection optical system member, and the light-receiving optical system member in a configuration with gaps between the cell and the respective optical system members to accommodate movement in a predetermined range along a direction perpendicular to an optical axis of the inspection light.

Abstract: A semiconductor manufacturing system comprises a main body that exclusively flows a first fluid that is used in a manufacturing process and a second fluid whose concentration is known, and that outputs a state signal showing whether or not the fluid flowing in the flow channel is the second fluid and a concentration measuring device having a concentration measuring part that measures a concentration of a predetermined component in the fluid flowing in the flow channel, a state signal receiving part that receives the state signal from the main body, and a correcting part that obtains a reference measurement value as being a measurement value measured by the concentration measuring part during a period while it is judged that the second fluid flows in the flow channel by the state signal and that corrects the concentration measuring part based on the reference measurement value.

Abstract: An optical measurement device is adapted to measure characteristics of a measurement targeted fluid based on a transmitted inspection light. The device comprises a cell having an internal space for accommodating the measurement targeted fluid to flow therein and having a pair of opposing through holes for transmitting the inspection light, each of the through holes sealed with a transparent member. The device includes a projection optical system member having a port for projecting the inspection light and a light-receiving optical system member having a port for receiving the inspection light transmitted through the internal space. A base member is provided for supporting the cell, the projection optical system member, and the light-receiving optical system member in a configuration with gaps between the cell and the respective optical system members to accommodate movement in a predetermined range along a direction perpendicular to an optical axis of the inspection light.