Patents by Inventor So Yon Kim

So Yon Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating semiconductor device having a crack resistant contact hole and a semiconductor device having a crack resistant hole
    Patent number: 5910679
    Abstract: A method for fabricating a semiconductor device having a crack resistant contact hole and such a semiconductor device include a lower layer pattern formed over a scribe lane region of a semiconductor substrate. An insulating film is then formed over the semiconductor substrate including the lower layer pattern. Next, the insulating film is partially removed to form a contact hole and a groove surrounding the contact hole. The contact hole exposes the lower layer pattern. Since the groove surrounding the contact hole reduces compressive stress and tensile stress, it is possible to prevent a crack from occurring at the contact hole.
    Type: Grant
    Filed: October 31, 1997
    Date of Patent: June 8, 1999
    Assignee: LG Semiconductor Co., Ltd.
    Inventor: So Yon Kim