Patents by Inventor Soenke Groth

Soenke Groth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120121816
    Abstract: A generally planar substrate pallet having an front, a back, and pair of sides. The distance between the front and the back and the distance between the sides are significantly longer than the thickness of the substrate pallet. The ratio of vertical deflection of the substrate pallet to the distance between the sides at temperatures used in high temperature processing systems relative to room temperature is less than 1%.
    Type: Application
    Filed: November 24, 2010
    Publication date: May 17, 2012
    Inventors: Josef Hoffmann, Tobias Bergmann, Soenke Groth, Horst Alt