Abstract: An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode.

Abstract: An optical reflection element has a frame-shaped supporting body, a first oscillator and a second oscillator each having a meander shape, and a mirror portion. A line segment connecting a joining position between the mirror portion and the first oscillator to a joining position between the supporting body and the first oscillator, and a line segment connecting a joining position of the mirror portion and the second oscillator to a joining position of the supporting body and the second oscillator cross a mirror portion central axis. An outer circumference of at least any one of turn portions of the first oscillator and the second oscillator is deviated from a first end portion axis that is parallel to the mirror portion central axis and extends along a first side of the mirror portion.

Abstract: A chip for a cell electrophysiological sensor has a substrate. The substrate has a through-hole formed from the upside to the downside, and the opening of the through-hole is formed in a curved surface curved from the upside and downside of the substrate toward the inner side of the through-hole. In this configuration, the electrolyte solution (first electrolyte solution and second electrolyte solution) flows more smoothly, and the sample cell can be sucked accurately, and the trapping rate of the sample cells is improved.

Abstract: An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.

Abstract: A cell electrophysiological sensor is provided with: a well having a wall formed by at least one curved face, with opening sections being formed on the two ends thereof; a frame substrate having a through hole and an electrode; a cell electrophysiological sensor chip that is provided with a thin plate having a second through hole; and a void substrate, and in this structure, the frame substrate has a thickness greater than the thickness of the cell electrophysiological sensor chip and the opening diameter of the third opening section is made larger than the opening diameter of the fourth opening section.

Abstract: A cell electrophysiological sensor is provided with: a well having a wall formed by at least one curved face, with opening sections being formed on the two ends thereof; a frame substrate having a through hole and an electrode; a cell electrophysiological sensor chip that is provided with a thin plate having a second through hole; and a void substrate, and in this structure, the frame substrate has a thickness greater than the thickness of the cell electrophysiological sensor chip and the opening diameter of the third opening section is made larger than the opening diameter of the fourth opening section.

Abstract: A silicon structure of the present invention is provided with a silicon substrate (1) to become a base, and a plurality of fibrous projections (2) made of silicon dioxide and directly joined to a silicon-made surface (1a) of the silicon substrate (1). By arbitrarily constructing an area where these fibrous projections (2) are formed in a predetermined area, it is possible to render the area to have at least either hydrophilicity or water retentivity, so as to provide a silicon structure useful for a variety of devices.

Abstract: A cell electrophysiological sensor is provided with: a well having a wall formed by at least one curved face, with opening sections being formed on the two ends thereof; a frame substrate having a through hole and an electrode; a cell electrophysiological sensor chip that is provided with a thin plate having a second through hole; and a void substrate, and in this structure, the frame substrate has a thickness greater than the thickness of the cell electrophysiological sensor chip and the opening diameter of the third opening section is made larger than the opening diameter of the fourth opening section.

Abstract: A component separating device includes a flow channel, an acoustic wave generator for generating an acoustic wave in the flow channel, a first inlet channel for introducing a fist solution containing solid particles into the flow channel, a second inlet channel for introducing a second solution, and outlet channels for discharging a solution from the flow channel. A density grade generator is provided at the first inlet channel for forming a density grade of the solid particles. This component separating device extracts the solid particles into a high-purity solution at a high collecting rate.

Abstract: A device for measuring cellular potential includes a substrate, a first electrode tank, a first electrode, a second electrode tank and a second electrode. The first electrode tank and the second electrode tank are disposed on the upper side and lower side of the substrate, respectively. The first electrode is disposed inside the first electrode tank and the second electrode is disposed inside the second electrode tank. The substrate includes a single crystal plate having a diamond structure with (100) plane orientation or (110) plane orientation. The substrate has a first surface provided with a depression and a second surface facing this first surface. From the depression to the second surface, a through-hole is formed. The depression has an inner wall extending from the opening of the through-hole to the outer periphery, curving and being connected to the first surface.

Abstract: A leakage current on a side surface of a sensor chip of a cell electrophysiological sensor is reduced. In order to do so, a sensor chip having a continuity hole and a chip holding part covering the side surface of the sensor chip are provided. The sensor chip includes silicon as a main component, and the chip holding part is made of glass. The chip holding part is adhesively bonded to the side surface of the sensor chip by glass welding. Thus, in the cell electrophysiological sensor device of the present invention, the airtightness between the side surface of the sensor chip and the chip holding part is improved, so that a leakage current can be reduced.

Abstract: A cell electro-physiological sensor includes a sensor chip including a partition board having a first surface and a second surface opposite to the first surface, a member for forming a first region provided on the first surface of the partition board, and a member for forming a second region provided on the second surface of the partition board. The partition board has a through-hole provided therein, the through-hole having a first opening which opens to the first surface, a second opening which opens to the second surface, and a wall. The first region contacts the first opening of the through-hole. The first region is arranged to contain cell suspension. The atomic ratio of carbon at the first surface of the partition board is not greater than 15 atomic percent of the composition of the first surface. The cell electro-physiological sensor causes the cell to be tightly held at the first opening of the through-hole in the partition board, thereby measuring a potential of the cell efficiently.

Abstract: A diaphragm is formed by etching a substrate. This substrate has a first surface provided with a depression by isotropic dry etching, and a second surface opposite the first surface. Furthermore, a through-hole is formed from the depression to the second surface by anisotropic dry etching. The depression and the through-hole are formed by using one resist mask. The depression has a hemispherical shape or a semi-elliptical spherical shape.

Abstract: A cell electrophysiological sensor is provided with: a well having a wall formed by at least one curved face, with opening sections being formed on the two ends thereof; a frame substrate having a through hole and an electrode; a cell electrophysiological sensor chip that is provided with a thin plate having a second through hole; and a void substrate, and in this structure, the frame substrate has a thickness greater than the thickness of the cell electrophysiological sensor chip and the opening diameter of the third opening section is made larger than the opening diameter of the fourth opening section.

Abstract: A chip for a cell electrophysiological sensor has a substrate. The substrate has a through-hole formed from the upside to the downside, and the opening of the through-hole is formed in a curved surface curved from the upside and downside of the substrate toward the inner side of the through-hole. In this configuration, the electrolyte solution (first electrolyte solution and second electrolyte solution) flows more smoothly, and the sample cell can be sucked accurately, and the trapping rate of the sample cells is improved.

Abstract: In a cell electrophysiological sensor having a thin plate with a through hole, a support plate with a through hole and a container plate with a through hole stuck to an upper portion of this support plate, the support plate and the container plate are stuck to each other through fusion with a portion of the outer shape of a first electrode in a ring shape intervening in a portion of the interface. In this configuration, a cell electrophysiological sensor which allows for measurement with high precision can be attained, and a manufacturing method which is excellent in terms of mass production can be provided.

Abstract: A cell electro-physiological sensor includes a sensor chip including a partition board having a first surface and a second surface opposite to the first surface, a member for forming a first region provided on the first surface of the partition board, and a member for forming a second region provided on the second surface of the partition board. The partition board has a through-hole provided therein, the through-hole having a first opening which opens to the first surface, a second opening which opens to the second surface, and a wall. The first region contacts the first opening of the through-hole. The first region is arranged to contain cell suspension. The atomic ratio of carbon at the first surface of the partition board is not greater than 15 atomic percent of the composition of the first surface. The cell electro-physiological sensor causes the cell to be tightly held at the first opening of the through-hole in the partition board, thereby measuring a potential of the cell efficiently.

Abstract: An adhesive composition is here disclosed which comprises a 2-cyanoacrylate and at least one of compounds (a) and (b):(a) an addition reaction product of an epoxy group and a compound having a cyano group and a carboxylic acid group in its molecule, and(b) a compound having a cyano group and a carboxylic acid group in its molecule. A process for preparing the adhesive composition is also disclosed herein. According to the present invention, the 2-cyanoacrylate-based adhesive composition can be obtained which is excellent in storage stability and hardening properties of thick films and which has a high hardening rate and remarkably improved surface hardening properties of the adhesive composition itself bulged from between adherends. Particularly, the 2-cyanoacrylate bulged from between the adherends can harden rapidly, so that the vaporization of the 2-cyanoacrylate can be minimized.

Abstract: There are here disclosed an adhesive composition obtained by adding a fluorine-containing carboxylic acid epoxy adduct to a 2-cyanoacrylate, and a process for preparing the adhesive composition. This 2-cyanoacrylate-based adhesive composition is excellent in storage stability and particularly excellent in adhesive force and impact resistance and has a high hardening rate. In particular, the adhesive strength of the 2-cyanoacrylate-based adhesive composition can be remarkably increased without lowering the hardening rate, and so the 2-cyanoacrylate-based adhesive composition can exert a sufficient resistance to impact and the like at the time of the adhesion of metals, rubbers, plastics and lumbers and the reliability of adherends can be improved.