Abstract: A large current electron beam is stably emitted from an electron gun of a charged particle beam device. The electron gun of the charged particle beam device includes: a SE tip 202; a suppressor 303 disposed rearward of a distal end of the SE tip; a cup-shaped extraction electrode 204 including a bottom surface and a cylindrical portion and enclosing the SE tip and the suppressor; and an insulator 208 holding the suppressor and the extraction electrode. A shield electrode 301 of a conductive metal having a cylindrical portion 302 is provided between the suppressor and the cylindrical portion of the extraction electrode. A voltage lower than a voltage of the SE tip is applied to the shield electrode.

Abstract: Collapse of resist patterns in the formation of resist patterns that employ chemically amplified resist material is suppressed. A method for forming a resist pattern includes the steps of: coating a substrate with a chemically amplified resist material; exposing the resist material; and developing the exposed resist material, to form a resist pattern having an aspect ratio AR of 1.5 or greater in a resist film formed by the resist material. A close contact process that improves close contact properties between the substrate and the resist film is controlled such that the thickness of residual film of the resist film is greater than or equal to 1 nm and less than or equal to 1.83·AR+1.73 nm.

Abstract: A method for producing a concaves-convex member having a concavo-convex pattern on a surface of a base material, including: forming a covering layer on surfaces of at least concave portions of an original master for producing a concavo-convex member, with a concavo-convex pattern provided on its surface; forming a barrier layer on a surface of the covering layer positioned at the at least concave portions of the original master; forming a base material by electrodepositing metal on a surface of the original master which is provided with the covering layer and the barrier layer on the at least concave portions; and separating, from the original master, the base material provided with the barrier layer and the covering layer over surfaces of at least convex portions, wherein a metal element contained in the barrier layer has an ionization tendency smaller than that of a metal element contained in the covering layer.

Abstract: An exhaust silencer, or muffler, for a motorcycle, wherein a pair of exhaust silencer tubes extending along the lengthwise direction of the body of the motorcycle are communicatively connected at their one end with both ends of a connecting tube extending in the breadthwise direction of the motorcycle body to increase the engine output and improve the silencing effect.