Abstract: A scanning SQUID microscope for acquiring spatially resolved images of physical properties of an object includes a SQUID sensor arranged in perpendicular to the plane of the object under investigation for detecting tangential component of the magnetic field generated by the object. During scanning of the SQUID sensor over the object under investigation, the position signal from a position interpreting unit, as well as relevant output signals from the SQUID sensor are processed by a processing unit which derives from the data, spatially resolved images of the physical properties of the object. The specific orientation of the SQUID sensor with respect to the plane of the object permits an enlarged area of the SQUID chip on which the modulation and feedback line can be fabricated in the same technological process with the SQUID sensor. Additionally, larger contact pads afforded provide for lower contact resistance and ease in forming contact with bias and read-out wires.

Abstract: A scanning SQUID microscope for acquiring spatially resolved images of physical properties of an object includes a SQUID sensor arranged in perpendicular to the plane of the object under investigation for detecting tangential component of the magnetic field generated by the object. During scanning of the SQUID sensor over the object under investigation, the position signal from a position interpreting unit, as well as relevant output signals from the SQUID sensor are processed by a processing unit which derives from the data, spatially resolved images of the physical properties of the object. The specific orientation of the SQUID sensor with respect to the plane of the object permits an enlarged area of the SQUID chip on which the modulation and feedback line can be fabricated in the same technological process with the SQUID sensor. Additionally, larger contact pads afforded provide for lower contact resistance and ease in forming contact with bias and read-out wires.

Abstract: A method of, an and apparatus for, creating an image of currents flowing through current paths in a microelectronic circuit such that the image of the currents has improved spatial resolution using filters. The filters increase the spatial resolution and eliminate noise and edge artifacts in magnetic field and electric field images of electronic circuits. In accordance with the method, a magnetic field image is created with a scanning SQUID microscope. A magnetic inversion technique is then used to convert the magnetic field image into a current density image. The current density image is filtered based upon known restrictions on the wiring geometry of the microelectronic circuit being imaged. The technique can also be applied to convert electric fields of a circuit from a scanning single electron transistor microscope into images of the voltage levels on the wires in the circuit.