Abstract: A deposition apparatus includes: a chamber; a deposition source disposed in the chamber to include nozzles arranged in a first direction; and a deposition angle limiter disposed on the deposition source in the chamber. The deposition angle limiter includes: a low-incident angle limiting plate disposed between adjacent first and second nozzles among the nozzles and spaced apart from the first nozzle by a first height in a height direction intersecting the first direction; and a high-incident angle limiting plate surrounding at least a portion of the first nozzle and spaced apart from the first nozzle by a second height in the height direction. The first nozzle extends in the height direction.

Abstract: An electrostatic chuck is disclosed. In one aspect, the electrostatic chuck includes a top plate, wherein first and second regions adjacent to each other are formed at a surface of the top plate. The electrostatic chuck also includes a first absorption plate positioned at the first region and a second absorption plate positioned at the second region to be separated from the first absorption plate. The first and second absorption plates are configured to support the absorption target.

Abstract: A method of manufacturing a display device includes providing a deposition source and a substrate facing each other, the deposition source including a rotating rod, an internal module engaged with the rotating rod and having a storage unit for storing a deposition material, and an external housing covering the rotating rod and the internal module and having an outlet communicating with ambient air, rotating the rotating rod in the deposition source, such that the internal module engaged with the rotating rod is rotated, and applying the deposition material discharged through the outlet of the external housing onto the substrate.

Abstract: An electrostatic chuck is disclosed. In one aspect, the electrostatic chuck includes a top plate, wherein first and second regions adjacent to each other are formed at a surface of the top plate. The electrostatic chuck also includes a first absorption plate positioned at the first region and a second absorption plate positioned at the second region to be separated from the first absorption plate. The first and second absorption plates are configured to support the absorption target.

Abstract: A donor film and a thermal imaging method, the film including a base layer; a first light-to-heat conversion layer on the base layer; and a second light-to-heat conversion layer on the first light-to-heat conversion layer and to which an organic material is deposited, wherein the first light-to-heat conversion layer and the second light-to-heat conversion layer respectively absorb light of different wavelengths.

Abstract: Provided are a laser induced thermal imaging (LITI) mask, a laser irradiation apparatus including the LITI mask, and a method of manufacturing an organic light emitting device by using the LITI mask. The LITI mask including an opening corresponding to a pixel region and an opening corresponding to an edge of a pixel is used to form an organic layer in an upper portion of a substrate of an organic light emitting device, thereby transferring the organic layer to an edge of the pixel region.

Abstract: A donor film and a thermal imaging method, the film including a base layer; a first light-to-heat conversion layer on the base layer; and a second light-to-heat conversion layer on the first light-to-heat conversion layer and to which an organic material is deposited, wherein the first light-to-heat conversion layer and the second light-to-heat conversion layer respectively absorb light of different wavelengths.

Abstract: An organic light-emitting display apparatus includes: a plurality of thin film transistors (TFTs); a planarization layer covering the plurality of TFTs; a plurality of pixel electrodes formed on the planarization layer, each of the pixel electrodes being connected to a corresponding one of the plurality of TFTs using a via-hole passing through the planarization layer and having a light-emitting portion and a non-emitting portion, and each of the via-holes being located at a point farthest from each of the light-emitting portions surrounding the via-hole; a pixel defining layer formed on the planarization layer to respectively cover each of the via-holes and the non-emitting portions; organic layers, each organic layer including an emission layer and being disposed in a corresponding one of the light-emitting portions; and a counter electrode disposed on each of the organic layers.

Abstract: A laser induced thermal imaging (LITI) apparatus includes a stage configured to support an acceptor substrate and a supporting portion configured to support a donor film and to move the donor film up and down relative to the stage so as to adjust a distance between the acceptor substrate and the donor film. The donor film includes a thin film to be disposed on the acceptor substrate. The stage includes a discharging outlet through which gas between the acceptor substrate and the donor film is discharged to the outside. The LITI apparatus may be used to laminate a film on an acceptor substrate including an organic light emitting display device.

Abstract: A laser irradiation device and a method of fabricating an organic light emitting display device (OLED) using the same are disclosed. The laser irradiation device includes: a laser source generating a laser beam; a mask disposed below the laser source and patterning the beam and a projection lens disposed below the mask and determining magnification of the laser beam through the mask, wherein the laser beam penetrating the mask has different doses in at least two regions. Thus, the laser irradiation device can maximize emission efficiency and enhance the quality of a transfer layer pattern when an organic layer of the OLED is formed using the laser irradiation device.

Abstract: An organic lighting emitting diode display device (OLED display device) and a method of fabricating the same. The OLED display device includes: a substrate; a first electrode disposed on the substrate; an emission layer disposed on the first electrode; a second electrode disposed on the emission layer; and a hole injection layer disposed between the first electrode and the emission layer or between the emission layer and the second electrode, and formed of an inorganic semiconductor material, which evaporates at a temperature of 1100° C. or less. The method includes forming the hole injection layer between the first electrode and the second electrode, by thermally evaporating the inorganic semiconductor material, at a temperature of 1100° C., or less.

Abstract: A laser induced thermal imaging apparatus and a fabricating method of organic light emitting diodes using the same, which laminate an acceptor substrate and a donor film using a magnetic force in vacuum, and are used to form a pixel array on the acceptor substrate. A substrate stage includes a magnet or magnetic substance. The acceptor substrate has a pixel region for forming first, second, and third sub-pixels, and the donor film has an organic light emission layer to be transferred to the pixel region. A laser oscillator irradiates a laser to the donor film. A contact frame is adapted to be disposed between the substrate stage and the laser oscillator, and is used to form a magnetic force with the substrate stage. The contact frame includes an opening through which the laser passes. A contact frame feed mechanism moves the contact frame in a direction of the substrate stage.

Abstract: A laser induced thermal imaging (LITI) apparatus and a method of making an electronic device using the same are disclosed. The LITI apparatus includes a chamber, a substrate support, a contact frame, and a laser source or oscillator. The LITI apparatus transfers a transferable layer from a film donor device onto a surface of an intermediate electronic device. The LITI apparatus uses a magnetic force to provide a close contact between the transferable layer and the surface of the intermediate device. The magnetic force is generated by magnetic materials formed in two components of the LITI apparatus that are spaced apart interposing transferable layer and the surface of the intermediate device. Magnets or magnetic materials are formed in the two following components of the LITI apparatus: 1) the intermediate device and the film donor device; 2) the intermediate device and the contact frame; 3) the substrate support and the film donor device; or 4) the substrate support and the contact frame.

Abstract: A laser induced thermal imaging apparatus and a fabricating method of organic light emitting diodes using the same, which laminate an acceptor substrate and a donor film using a magnetic force in vacuum, and are used to form a pixel array on the acceptor substrate. A substrate stage includes a magnet or magnetic substance. The acceptor substrate has a pixel region for forming first, second, and third sub-pixels, and the donor film has an organic light emission layer to be transferred to the pixel region. A laser oscillator irradiates a laser to the donor film. A contact frame is adapted to be disposed between the substrate stage and the laser oscillator, and is used to form a magnetic force with the substrate stage. The contact frame includes an opening through which the laser passes. A contact frame feed mechanism moves the contact frame in a direction of the substrate stage.

Abstract: A laser irradiation device and a method of fabricating an organic light emitting display device (OLED) using the same are disclosed. The laser irradiation device includes: a laser source generating a laser beam; a mask disposed below the laser source and patterning the beam and a projection lens disposed below the mask and determining magnification of the laser beam through the mask, wherein the laser beam penetrating the mask has different doses in at least two regions. Thus, the laser irradiation device can maximize emission efficiency and enhance the quality of a transfer layer pattern when an organic layer of the OLED is formed using the laser irradiation device.

Abstract: A laser induced thermal imaging apparatus and a fabricating method of organic light emitting diodes using the same, which laminate an acceptor substrate and a donor film using a magnetic force in vacuum, and are used to form a pixel array on the acceptor substrate. A substrate stage includes a magnet or magnetic substance. The acceptor substrate has a pixel region for forming first, second, and third sub-pixels, and the donor film has an organic light emission layer to be transferred to the pixel region. A laser oscillator irradiates a laser to the donor film. A contact frame is adapted to be disposed between the substrate stage and the laser oscillator, and is used to form a magnetic force with the substrate stage. The contact frame includes an opening through which the laser passes. A contact frame feed mechanism moves the contact frame in a direction of the substrate stage.

Abstract: A laser irradiation device and a method of fabricating an organic light emitting display device (OLED) using the same are disclosed. The laser irradiation device includes: a laser source generating a laser beam; a mask disposed below the laser source and patterning the beam and a projection lens disposed below the mask and determining magnification of the laser beam through the mask, wherein the laser beam penetrating the mask has different doses in at least two regions. Thus, the laser irradiation device can maximize emission efficiency and enhance the quality of a transfer layer pattern when an organic layer of the OLED is formed using the laser irradiation device.

Abstract: A donor substrate may include a base substrate, an expansion layer positioned on the base substrate, a light-to-heat conversion layer on the expansion layer, an insulation layer located on the light-to-heat conversion layer, and an organic transfer layer on the insulation layer. The donor substrate may effectively and uniformly transfer the organic transfer layer onto a display substrate of an organic light emitting display device.

Abstract: A donor film and a method of manufacturing an organic light emitting device using the donor film. The donor film having a stack structure includes: a first layer comprising first transfer portions comprising a light emitting material of a first color, and first opening portions; a second layer that is formed on the first layer and comprising second transfer portions corresponding to the first opening portion and further comprising a light emitting material of a second color, and second opening portions; and a third layer that is formed on the second layer and comprising third transfer portions corresponding to the first and second opening portions and further comprising a light emitting material of a third color, and third opening portions.

Abstract: An organic lighting emitting diode display device (OLED display device) and a method of fabricating the same. The OLED display device includes: a substrate; a first electrode disposed on the substrate; an emission layer disposed on the first electrode; a second electrode disposed on the emission layer; and a hole injection layer disposed between the first electrode and the emission layer or between the emission layer and the second electrode, and formed of an inorganic semiconductor material, which evaporates at a temperature of 1100° C. or less. The method includes forming the hole injection layer between the first electrode and the second electrode, by thermally evaporating the inorganic semiconductor material, at a temperature of 1100° C., or less.