Patents by Inventor Son-Lung Chen

Son-Lung Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ETCHING APPARATUS FOR SEMICONDUCTOR PROCESSING APPARATUS AND METHOD THEREOF FOR RECYCLING ETCHANT SOLUTIONS
    Publication number: 20080217296
    Abstract: An etching apparatus of a semiconductor processing apparatus and the method thereof for recycling etchant solutions are provided. The method is suitable for a processing apparatus which provides an etchant solution on a wafer so as to perform an etching process. After the etching process is completed, a water solution is added to the etchant solution for maintaining a water content thereof. Then, the mixed etchant solution is recycled.
    Type: Application
    Filed: March 7, 2007
    Publication date: September 11, 2008
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Son-Lung Chen, Ying-Fang Chen, I-Yao Chen, Kuo-Chang Chu, Guo-Qiang Wu