Patents by Inventor Song-Moon Sun

Song-Moon Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IN SITU CHAMBER CLEAN WITH INERT HYDROGEN HELIUM MIXTURE DURING WAFER PROCESS
    Publication number: 20140196746
    Abstract: Embodiments of the present invention generally relate to a method for cleaning a processing chamber during substrate processing. During a first substrate processing step, a plasma is formed from a gas mixture of argon, helium, and hydrogen in the processing chamber. In a second substrate processing step, an argon plasma is formed in the processing chamber.
    Type: Application
    Filed: January 17, 2013
    Publication date: July 17, 2014
    Inventors: Robert Dinsmore, John C. Forster, Song-Moon Sun, Cheng-Hsiung Tsai, Glen T. Mori