Patents by Inventor Song-Won Kang

Song-Won Kang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Facility and method for manufacturing semiconductor device and stocker used in the facility
    Publication number: 20050074313
    Abstract: A facility for manufacturing a semiconductor device is provided. The facility includes a process room for performing a predetermined process on a wafer, and a stocker for keeping a FOUP receiving the wafers on which the process has been completely performed. The FOUP is filled with nitrogen gas and stored in the stocker. A sealing member is fixed on a pedestal in the stocker so as to close the hole penetrating the FOUP placed on the pedestal.
    Type: Application
    Filed: October 1, 2004
    Publication date: April 7, 2005
    Inventors: Song-Won Kang, Sun-Yong Lee, Sung-Il Kim, Myung-Hwan Shin, Chi-Woon Jang