Abstract: Embodiments of the present disclosure generally relate to a substrate support having a surface coating which reduces defect formation and back side metal contamination during substrate processing. A support body includes a body having an outer surface and a surface coating formed from a non-metal or a reduced-metal material disposed over at least a top surface of the outer surface of the body. In an embodiment, the surface coating includes a two-part coating having an optional first coating layer formed over an entire outer surface of the support body.

Abstract: A plasma processing system for cleaning a substrate is provided. The plasma processing system includes a process chamber that includes: a chamber body enclosing an interior volume; and a substrate support disposed in the interior volume. The plasma processing system includes a vacuum pump; a first exhaust line fluidly coupled between the interior volume of the process chamber and the vacuum pump; and a second exhaust line fluidly coupled between the interior volume of the process chamber and the vacuum pump. The first exhaust line and the second exhaust line are arranged to provide alternative paths for the exhaust between the interior volume and the vacuum pump, and the first exhaust line has an internal diameter that is at least 50% smaller than the internal diameter of the second exhaust line.

Abstract: Apparatus for processing a substrate are described herein. More specifically, embodiments described herein relate to separate pre-clean process modules and pre-clean control modules coupled to a cluster tool assembly. Each pre-clean process module and each pre-clean control module are connected by a cable conduit which is configured to have power and control cables passing therethrough between the pre-clean process module and the ore-clean control module. A maintenance passage is formed through the cluster tool assembly. Each of a purge gas source, a process gas source, a manometer, an isolation port, and a throttle valve are all accessible from one side of the pre-clean process module.

Abstract: Embodiments of the present disclosure generally relate to a substrate support having a two-part surface coating which reduces defect formation and back side metal contamination during substrate processing. A support body includes a body having an upper surface and a two-part coating disposed over the upper surface of the body. The two-part coating includes a first coating layer extending a first radial distance from a center of the body. The first coating layer includes at least one of a metal-containing material or alloy. The two-part coating includes a second coating layer disposed over the first coating layer. The second coating layer extends a second radial distance from the center of the body. The first radial distance is greater than the second radial distance. The second coating layer is non-metal.

Abstract: Embodiments of the present disclosure generally relate to an integrated substrate processing system for cleaning a substrate surface and subsequently performing an epitaxial deposition process thereon. A processing system includes a film formation chamber, a transfer chamber coupled to the film formation chamber, and an oxide removal chamber coupled to the transfer chamber, the oxide removal chamber having a substrate support. The processing system includes a controller configured to introduce a process gas mixture into the oxide removal chamber, the process gas mixture including a fluorine-containing gas and a vapor including at least one of water, an alcohol, an organic acid, or combinations thereof. The controller is configured to expose a substrate positioned on the substrate support to the process gas mixture, thereby removing an oxide film from the substrate.

Abstract: A substrate processing system includes a factory interface having a controlled environment and a transfer chamber. The transfer chamber includes four first facets and three second facets, where each of the three second facets has a width that is narrower than that of each of the four first facets. A first processing chamber is attached to one of the four first facets. A first auxiliary chamber is attached to a first of the three second facets, where the first auxiliary chamber is smaller than the first processing chamber. A load lock is attached to a second of the three second facets and to the factory interface. A robot is attached to a bottom of the transfer chamber, the robot adapted to transfer substrates to and from the first processing chamber, the first auxiliary chamber, and the load lock.

Abstract: Disclosed is an apparatus and a method for controlling data interface. The apparatus for controlling data interface comprises: a transmitting terminal outputting signal including a CDR (Clock Data Recovery) training signal, an align training signal and display data sequentially; a receiving terminal inputting the signals from the transmitting terminal; and a Rx monitoring device detecting an abnormal status of the receiving terminal by monitoring an input timing signal and an operating status of the receiving terminal, and resetting the receiving terminal when the receiving terminal operates abnormally.

Abstract: A liquid crystal display and a driving method thereof are provided. The liquid crystal display includes a liquid crystal display panel, a register for storing pixel information of a problem pattern and polarity pattern information, a block pattern recognition unit for comparing input data with the problem pattern to count the number of problem patterns contained in the input data and comparing the count value with a first threshold value, a line pattern recognition unit for determining the line containing the problem pattern as a problem line, a frame pattern recognition unit for comparing the number of problem lines with a second threshold value, and determining the frame containing the input data as a problem frame, a polarity control signal generating unit for generating vertical and horizontal polarity control signals, and source drive integrated circuits (ICs) for controlling the vertical and horizontal polarities of data voltages supplied to the data lines.

Abstract: A timing controller, a display device using the timing controller, and a method for driving the timing controller are discussed. The timing controller includes a frequency change sensing unit, that measures a length of an (n?1)th frame period and a length of an nth frame period, where n is a natural number equal to or greater than 2, and outputs timing signals of a low logic level when a length difference between the (n?1)th frame period and the nth frame period is greater than a predetermined first threshold value, a scan timing control signal output unit for outputting a scan timing control signal based on the timing signals, and a data timing control signal output unit controlling a data driving circuit based on the timing signals.

Abstract: Disclosed is an apparatus and a method for controlling data interface. The apparatus for controlling data interface comprises: a transmitting terminal outputting signal including a CDR (Clock Data Recovery) training signal, an align training signal and display data sequentially; a receiving terminal inputting the signals from the transmitting terminal; and a Rx monitoring device detecting an abnormal status of the receiving terminal by monitoring an input timing signal and an operating status of the receiving terminal, and resetting the receiving terminal when the receiving terminal operates abnormally.

Abstract: A liquid crystal display and a driving method thereof are provided. The liquid crystal display includes: a liquid crystal display panel including a plurality of data lines, a plurality of gate lines crossing the data lines, and pixels arranged in m×n matrix; a register for defining polarity pattern information, frame rotation information, and line rotation information to determine a polarity of a data voltage charged in N lines, wherein N is a positive integer less than n; a timing controller for generating a polarity control signal to control polarities of data voltages charged in n lines of the liquid crystal display panel based on the information read from the register; and source drive ICs for converting the polarities of the data voltages supplied to the data lines in response to the polarity control signal.

Abstract: A timing controller, a display device using the timing controller, and a method for driving the timing controller are discussed. The timing controller includes a frequency change sensing unit, that measures a length of an (n?1)th frame period and a length of an nth frame period, where n is a natural number equal to or greater than 2, and outputs timing signals of a low logic level when a length difference between the (n?1)th frame period and the nth frame period is greater than a predetermined first threshold value, a scan timing control signal output unit for outputting a scan timing control signal based on the timing signals, and a data timing control signal output unit controlling a data driving circuit based on the timing signals.

Abstract: A liquid crystal display and a driving method thereof are provided. The liquid crystal display includes: a liquid crystal display panel including a plurality of data lines, a plurality of gate lines crossing the data lines, and pixels arranged in m×n matrix; a register for defining polarity pattern information, frame rotation information, and line rotation information to determine a polarity of a data voltage charged in N lines, wherein N is a positive integer less than n; a timing controller for generating a polarity control signal to control polarities of data voltages charged in n lines of the liquid crystal display panel based on the information read from the register; and source drive ICs for converting the polarities of the data voltages supplied to the data lines in response to the polarity control signal.

Abstract: A liquid crystal display and a driving method thereof are provided. The liquid crystal display includes a liquid crystal display panel, a register for storing pixel information of a problem pattern and polarity pattern information, a block pattern recognition unit for comparing input data with the problem pattern to count the number of problem patterns contained in the input data and comparing the count value with a first threshold value, a line pattern recognition unit for determining the line containing the problem pattern as a problem line, a frame pattern recognition unit for comparing the number of problem lines with a second threshold value, and determining the frame containing the input data as a problem frame, a polarity control signal generating unit for generating vertical and horizontal polarity control signals, and source drive integrated circuits (ICs) for controlling the vertical and horizontal polarities of data voltages supplied to the data lines.

Abstract: In a first aspect, a valve assembly is provided that includes a valve assembly output adapted to output at least one of DI water and a chemical. A first valve of the valve assembly includes (1) a first input adapted to receive the chemical; (2) a first output adapted to circulate the chemical to a chemical return; and (3) a second output adapted to output the chemical to the valve assembly output. The valve assembly also includes a second valve positioned downstream from the first valve. The second valve includes (1) an input adapted to receive deionized (DI) water; and (2) an output adapted to output DI water to the valve assembly output. A check valve is coupled between the second output of the first valve and the output of the second valve, and the first valve, second valve and check valve are included in a single manifold.

Abstract: A method and apparatus for the delivery of slurry solution comprising an ultrasonic flow meter positioned between a fluid preparation manifold and a slurry delivery arm, and a shutoff valve positioned between a proportional valve and the slurry delivery arm. Also, a method and apparatus for the delivery of slurry solution including an ultrasonic flow meter positioned to receive fluid from a fluid preparation manifold, a proportional valve and stepper motor in communication with the flow meter, and a reverse flow restrictor in communication with the proportional valve and a slurry delivery arm.

Abstract: A method and apparatus for the delivery of slurry solution comprising an ultrasonic flow meter positioned between a fluid preparation manifold and a slurry delivery arm, and a shutoff valve positioned between a proportional valve and the slurry delivery arm. Also, a method and apparatus for the delivery of slurry solution including an ultrasonic flow meter positioned to receive fluid from a fluid preparation manifold, a proportional valve and stepper motor in communication with the flow meter, and a reverse flow restrictor in communication with the proportional valve and a slurry delivery arm.

Abstract: In a first aspect, a valve assembly is provided that includes a valve assembly output adapted to output at least one of DI water and a chemical. A first valve of the valve assembly includes (1) a first input adapted to receive the chemical; (2) a first output adapted to circulate the chemical to a chemical return; and (3) a second output adapted to output the chemical to the valve assembly output. The valve assembly also includes a second valve positioned downstream from the first valve. The second valve includes (1) an input adapted to receive deionized (DI) water; and (2) an output adapted to output DI water to the valve assembly output. A check valve is coupled between the second output of the first valve and the output of the second valve, and the first valve, second valve and check valve are included in a single manifold.

Abstract: In a first aspect, a valve assembly is provided that includes a valve assembly output adapted to output at least one of DI water and a chemical. A first valve of the valve assembly includes (1) a first input adapted to receive the chemical; (2) a first output adapted to circulate the chemical to a chemical return; and (3) a second output adapted to output the chemical to the valve assembly output. The valve assembly also includes a second valve positioned downstream from the first valve. The second valve includes (1) an input adapted to receive deionized (DI) water; and (2) an output adapted to output DI water to the valve assembly output. A check valve is coupled between the second output of the first valve and the output of the second valve, and the first valve, second valve and check valve are included in a single manifold.

Abstract: In a first aspect, a valve assembly is provided that includes a valve assembly output adapted to output at least one of DI water and a chemical. A first valve of the valve assembly includes (1) a first input adapted to receive the chemical; (2) a first output adapted to circulate the chemical to a chemical return; and (3) a second output adapted to output the chemical to the valve assembly output. The valve assembly also includes a second valve positioned downstream from the first valve. The second valve includes (1) an input adapted to receive deionized (DI) water; and (2) an output adapted to output DI water to the valve assembly output. A check valve is coupled between the second output of the first valve and the output of the second valve, and the first valve, second valve and check valve are included in a single manifold.