Abstract: An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a desired location on the surface, which is a scanned spot having a known scanned spot size. The incident beam impinges on the surface to create scattered light that is collected by a collector module. The collector module includes collection optics for collecting and focusing the scattered light to form focused scattered light. A collector output slit is positioned at an output of the collector module, through which the collection optics focus the scattered light. The scattered light that is associated with the scanned spot forms an imaged spot at the collector output slit.

Abstract: An optical system includes a sample carrier receiving region configured to receive a sample carrier carrying a sample for processing, a source that emits an excitation signal having a wavelength within a first predetermined wavelength range, and a first set of optical components that direct the excitation signal along an excitation path to the sample carrier receiving region, wherein radiation having a wavelength within a second predetermined wavelength range is emitted from the sample carrier receiving region in response to receiving the excitation signal. The optical system further includes a detector configured to detect the emitted radiation and generates a signal indicative of a power of the detected radiation and a second set of optical components that directs the emitted radiation along a collection path to the detector. The optical system further includes a power meter that measures a power of the radiation emitted from the sample carrier receiving region and generates a signal indicative thereof.

Abstract: An optical system includes a sample carrier receiving region configured to receive a carrier carrying a sample for processing, a source that emits an excitation signal having a wavelength within a first predetermined wavelength range, and a first set of optical components that direct the excitation signal along an excitation path to the sample carrier receiving region, wherein radiation having a wavelength within a second predetermined wavelength range is emitted from the sample carrier receiving region in response to receiving the excitation signal. The system further includes a detector configured to detect the emitted radiation and generates a signal indicative of a power of the detected radiation and a second set of optical components that directs the emitted radiation along a collection path to the detector and a power meter that measures a power of the radiation emitted from the sample carrier receiving region and generates a signal indicative thereof.

Abstract: An optical detection system includes a sample carrier receiving region that receives a sample carrier carrying a sample. The system further includes a source that emits an excitation signal having a wavelength within a predetermined wavelength range. The excitation signal illuminates the sample carrier. A first sub-portion of the excitation signal is absorbed by the sample, which emits characteristic radiation in response thereto. A second sub-portion of the excitation signal traverses the sample carrier. The system further includes a detector that detects the characteristic radiation. The system further includes an absorber that absorbs the excitation signal traversing the sample carrier without being absorbed by the sample or sample carrier. The absorber absorbs at least 95% of the excitation signal traversing the sample carrier.

Abstract: An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece. The surface inspection system has an incident beam projected through a back quartersphere and toward a desired location on the surface, which is a scanned spot having a known scanned spot size. The incident beam impinges on the surface to create scattered light that is collected by a collector module. The collector module includes collection optics for collecting and focusing the scattered light to form focused scattered light. A collector output slit is positioned at an output of the collector module, through which the collection optics focus the scattered light. The scattered light that is associated with the scanned spot forms an imaged spot at the collector output slit.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: An optical detection system includes a detector configured to detect a signal emitted from a sample carrier and generate an output indicative of the signal detected by the detector. The sample carrier emits the signal in response to the sample carrier being scanned by an excitation source, the emitted signal is indicative of a structural characteristic of the sample carrier, and the sample carrier includes bulk material, at least one material free chamber and a bulk material/chamber interface for each chamber. The optical detection system further includes a data evaluator that identifies the structural characteristic of the sample carrier based on the output of the detector and generates data indicative of the identified structural characteristic.

Abstract: An optical system includes a sample carrier receiving region configured to receive a carrier carrying a sample for processing, a source that emits an excitation signal having a wavelength within a first predetermined wavelength range, and a first set of optical components that direct the excitation signal along an excitation path to the sample carrier receiving region, wherein radiation having a wavelength within a second predetermined wavelength range is emitted from the sample carrier receiving region in response to receiving the excitation signal. The system further includes a detector configured to detect the emitted radiation and generates a signal indicative of a power of the detected radiation and a second set of optical components that directs the emitted radiation along a collection path to the detector and a power meter that measures a power of the radiation emitted from the sample carrier receiving region and generates a signal indicative thereof.

Abstract: An optical detection system (100) includes an optical element (116, 202, 502) that directs emission radiation (108), which traverses away from an optical collection path (122), to the path, wherein the emission radiation is emitted by a radiation sensitive material in a sample (204) under study in response to the material absorbing excitation radiation, and the emission radiation has a spectral characteristic that corresponds to the material.

Abstract: An optical detection system includes a sample carrier receiving region that receives a sample carrier carrying a sample. The system further includes a source that emits an excitation signal having a wavelength within a predetermined wavelength range. The excitation signal illuminates the sample carrier. A first sub-portion of the excitation signal is absorbed by the sample, which emits characteristic radiation in response thereto. A second sub-portion of the excitation signal traverses the sample carrier. The system further includes a detector that detects the characteristic radiation. The system further includes an absorber that absorbs the excitation signal traversing the sample carrier without being absorbed by the sample or sample carrier. The absorber absorbs at least 95% of the excitation signal traversing the sample carrier.

Abstract: An optical detection system includes a detector configured to detect a signal emitted from a sample carrier and generate an output indicative of the signal detected by the detector. The sample carrier emits the signal in response to the sample carrier being scanned by an excitation source, the emitted signal is indicative of a structural characteristic of the sample carrier, and the sample carrier includes bulk material, at least one material free chamber and a bulk material/chamber interface for each chamber. The optical detection system further includes a data evaluator that identifies the structural characteristic of the sample carrier based on the output of the detector and generates data indicative of the identified structural characteristic.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module.