Patents by Inventor Sonja Muringer

Sonja Muringer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for etching a workpiece, an apparatus configured to etch a workpiece, and a non-transitory computer readable medium
    Patent number: 10246782
    Abstract: A method for etching a workpiece may be provided, which may include: determining a plurality of reference etch profiles for a plurality of positions of an etchant dispenser, each reference etch profile corresponding to a respective position of the plurality of positions of the etchant dispenser; determining a thickness profile of the workpiece; determining a respective etch duration for each position of the plurality of positions of the etchant dispenser based on the determined thickness profile and the plurality of reference etch profiles, to reduce a total thickness variation of the workpiece; and dispensing an etchant over the workpiece via the etchant dispenser for the determined respective etch duration for each position of the plurality of positions.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: April 2, 2019
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Karl Pilch, Sonja Muringer
  • METHODS FOR ETCHING A WORKPIECE, AN APPARATUS CONFIGURED TO ETCH A WORKPIECE, AND A NON-TRANSITORY COMPUTER READABLE MEDIUM
    Publication number: 20150267304
    Abstract: A method for etching a workpiece may be provided, which may include: determining a plurality of reference etch profiles for a plurality of positions of an etchant dispenser, each reference etch profile corresponding to a respective position of the plurality of positions of the etchant dispenser; determining a thickness profile of the workpiece; determining a respective etch duration for each position of the plurality of positions of the etchant dispenser based on the determined thickness profile and the plurality of reference etch profiles, to reduce a total thickness variation of the workpiece; and dispensing an etchant over the workpiece via the etchant dispenser for the determined respective etch duration for each position of the plurality of positions.
    Type: Application
    Filed: June 10, 2015
    Publication date: September 24, 2015
    Inventors: Karl PILCH, Sonja MURINGER
  • Methods for etching a workpiece, an apparatus configured to etch a workpiece, and a non-transitory computer readable medium
    Patent number: 9079210
    Abstract: A method for etching a workpiece may be provided, which may include: determining a plurality of reference etch profiles for a plurality of positions of an etchant dispenser, each reference etch profile corresponding to a respective position of the plurality of positions of the etchant dispenser; determining a thickness profile of the workpiece; determining a respective etch duration for each position of the plurality of positions of the etchant dispenser based on the determined thickness profile and the plurality of reference etch profiles, to reduce a total thickness variation of the workpiece; and dispensing an etchant over the workpiece via the etchant dispenser for the determined respective etch duration for each position of the plurality of positions.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: July 14, 2015
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Karl Pilch, Sonja Muringer
  • METHODS FOR ETCHING A WORKPIECE, AN APPARATUS CONFIGURED TO ETCH A WORKPIECE, AND A NON-TRANSITORY COMPUTER READABLE MEDIUM
    Publication number: 20150021296
    Abstract: A method for etching a workpiece may be provided, which may include: determining a plurality of reference etch profiles for a plurality of positions of an etchant dispenser, each reference etch profile corresponding to a respective position of the plurality of positions of the etchant dispenser; determining a thickness profile of the workpiece; determining a respective etch duration for each position of the plurality of positions of the etchant dispenser based on the determined thickness profile and the plurality of reference etch profiles, to reduce a total thickness variation of the workpiece; and dispensing an etchant over the workpiece via the etchant dispenser for the determined respective etch duration for each position of the plurality of positions.
    Type: Application
    Filed: July 22, 2013
    Publication date: January 22, 2015
    Applicant: Infineon Technologies AG
    Inventors: Karl Pilch, Sonja Muringer