Patents by Inventor Sonja Radelow

Sonja Radelow has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of thin film process control and calibration standard for optical profilometry step height measurement
    Patent number: 6490033
    Abstract: A method of calibrating an interferometer system and a multilayer thin film used for calibrating the interferometer system. The method including measuring the step height of a gold step with the interferometer system, the multilayer thin film comprising a gold layer that defines the gold step. The multilayer thin film having an optical flat, a first layer on the surface of the optical flat, a second layer on the first layer, a test layer on a part of the second layer, and a gold layer on the test layer and on a part of the second layer uncovered by the test layer. The test layer having a test layer step, and the gold layer having a gold step over the test layer step. Also, a reference standard and a method of making the reference standard for a thin film sample with one or more component thin film layers, the reference standard having a gold layer over the surface of the thin film sample.
    Type: Grant
    Filed: January 5, 2000
    Date of Patent: December 3, 2002
    Assignee: Lucent Technologies Inc.
    Inventors: David Gerald Coult, Gustav Edward Derkits, Jr., Franklin Roy Dietz, Ranjani C. Muthiah, Sonja Radelow