Patents by Inventor Sonoe NAKAOKA

Sonoe NAKAOKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pattern formation method
    Patent number: 9349585
    Abstract: According to an embodiment, a guide pattern having a first opening pattern and a second opening pattern shallower than the first opening pattern, is formed on a film to be processed. A directed self-assembly material is set into the first and second opening patterns. The directed self-assembly material is phase-separated into first and second phases in the first and second opening patterns. A third opening pattern is formed by removing the first phase. The third opening pattern in the second opening pattern is eliminated, and the second and third opening patterns are transferred to the film to be processed, by one etching to be processed from the tops of the second and third opening patterns.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: May 24, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Sonoe Nakaoka, Kentaro Matsunaga, Eiji Yoneda
  • PATTERN FORMATION METHOD
    Publication number: 20160064216
    Abstract: According to an embodiment, a guide pattern having a first opening pattern and a second opening pattern shallower than the first opening pattern, is formed on a film to be processed. A directed self-assembly material is set into the first and second opening patterns. The directed self-assembly material is phase-separated into first and second phases in the first and second opening patterns. A third opening pattern is formed by removing the first phase. The third opening pattern in the second opening pattern is eliminated, and the second and third opening patterns are transferred to the film to be processed, by one etching to be processed from the tops of the second and third opening patterns.
    Type: Application
    Filed: December 19, 2014
    Publication date: March 3, 2016
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Sonoe NAKAOKA, Kentaro Matsunaga, Eiji Yoneda