Patents by Inventor Soo-Bin Yong

Soo-Bin Yong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR DRYING SUBSTRATES
    Publication number: 20140298669
    Abstract: A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.
    Type: Application
    Filed: May 2, 2014
    Publication date: October 9, 2014
    Applicant: SEMES CO., LTD.
    Inventors: Young-Ju Jeong, Bok-Kyu Lee, Sun-Kyu Hwang, Jeong-Yong Bae, Soo-Bin Yong
  • Apparatus and method for drying substrates
    Patent number: 8793898
    Abstract: A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.
    Type: Grant
    Filed: May 22, 2008
    Date of Patent: August 5, 2014
    Assignee: Semes Co., Ltd.
    Inventors: Young-Ju Jeong, Bok-Kyu Lee, Sun-Kyu Hwang, Jeong-Yong Bae, Soo-Bin Yong
  • APPARATUS AND METHOD FOR DRYING SUBSTRATES
    Publication number: 20130074359
    Abstract: A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.
    Type: Application
    Filed: November 2, 2012
    Publication date: March 28, 2013
    Applicant: SEMES CO., LTD.
    Inventors: Young-Ju JEONG, Bok-Kyu LEE, Sun-Kyu HWANG, Jeong-Yong BAE, Soo-Bin YONG
  • APPARATUS AND METHOD FOR DRYING SUBSTRATES
    Publication number: 20100146813
    Abstract: A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.
    Type: Application
    Filed: May 22, 2008
    Publication date: June 17, 2010
    Applicant: SEMES CO., LTD.
    Inventors: Young-Ju Jeong, Bok-Kyu Lee, Sun-Kyu Hwang, Jeong-Yong Bae, Soo-Bin Yong