Patents by Inventor Soo Boo Lim

Soo Boo Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum processing apparatus
    Patent number: 7682481
    Abstract: The present invention provides a vacuum processing apparatus that allows easy exchange of processing chambers. A vacuum processing apparatus of the present invention has a processing chamber and a carrying-in-and-out chamber. The carrying-in-and-out chamber is fixed and located at a position above the processing chamber. The processing chamber can be lowered by a vertically moving mechanism. Therefore, the processing chamber is separated from the carrying-in-and-out chamber by lowering the processing chamber. A conveying means is connected to the processing chamber so that it is possible to easily convey the processing chamber after being removed from the carrying-in-and-out chamber. The operation for exchanging the processing chambers can be simpler than in the conventional systems.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: March 23, 2010
    Assignee: Ulvac, Inc.
    Inventors: Seiichi Takahashi, Takehisa Miyaya, Soo Boo Lim, Masayuki Satou, Kengo Tsutsumi, Yohei Ono