Patents by Inventor Soo Chang Chang

Soo Chang Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering system
    Patent number: 6887357
    Abstract: A sputtering system for depositing a thin film on a substrate includes a vacuum chamber, a support for supporting the substrate in the vacuum chamber, a target arranged to oppose the support, a fixed plate formed on a first side of the target, and a plurality of electromagnets formed on the fixed plate in a cell pattern.
    Type: Grant
    Filed: February 15, 2002
    Date of Patent: May 3, 2005
    Assignee: LG. Philips LCD Co., Ltd.
    Inventor: Soo Chang Chang
  • Sputtering system
    Publication number: 20020170822
    Abstract: A sputtering system for depositing a thin film on a substrate includes a vacuum chamber, a support for supporting the substrate in the vacuum chamber, a target arranged to oppose the support, a fixed plate formed on a first side of the target, and a plurality of electromagnets formed on the fixed plate in a cell pattern.
    Type: Application
    Filed: February 15, 2002
    Publication date: November 21, 2002
    Applicant: LG. Philips LCD Co., Ltd.
    Inventor: Soo Chang Chang