Patents by Inventor Soo Cheon JANG

Soo Cheon JANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • POLISHING PAD FOR WAFER POLISHING DEVICE, AND APPARATUS AND METHOD FOR MANUFACTURING SAME
    Publication number: 20230040654
    Abstract: The present invention provides a method for manufacturing a polishing pad, the method comprising: a step for manufacturing a non-woven pad; a polyurethane impregnation step for impregnating the non-woven pad with polyurethane; and a surface polishing step for polishing the surface of the non-woven pad impregnated with polyurethane, wherein the polyurethane impregnation step and the surface polishing step are performed such that the density ratio between the surface layer and the inside of the polishing pad is uniform.
    Type: Application
    Filed: May 8, 2020
    Publication date: February 9, 2023
    Inventors: Jin Woo AHN, Soo Cheon JANG