Patents by Inventor Soo NAM GOONG

Soo NAM GOONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA ETCHING METHOD AND PLASMA ETCHING DEVICE
    Publication number: 20240096596
    Abstract: The present invention introduces a plasma etching method and apparatus. The plasma etching method may include forming a photoresist pattern on a target etching layer, hardening the surface of the photoresist pattern by exposing to a first plasma generated from a first discharge gas containing a reforming gas including carbon (C) and sulfur (S) and sequentially annealing, and etching the target etching layer with a second plasma generated from a second discharge gas using the surface-hardened photoresist pattern as a mask.
    Type: Application
    Filed: September 20, 2023
    Publication date: March 21, 2024
    Applicant: Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
    Inventors: Geun Young YEOM, Wonjun CHANG, Hee Ju KIM, Ji Eun KANG, Soo NAM GOONG, Jong Woo HONG