Abstract: A method for forming a replica stamper for use in mass producing an optical disk, wherein the optical disk has a plurality of tracks arranged spirally or concentrically, and each of the tracks includes a recess and a protrusion for recording information signals thereon, comprises the steps of: (a) preparing a master stamper having a top surface and a flat bottom surface, wherein the top surface of the master stamper includes a plurality of tracks corresponding to the plurality of tracks of the optical disk; (b) depositing a buffer layer on the top surface of the master stamper; (c) forming a replica stamper on top of the buffer layer; (d) disengaging the master stamper from the buffer layer and the replica stamper; and (e) removing the buffer layer from the replica stamper.