Patents by Inventor Soo Yeong Yang

Soo Yeong Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA GENERATION UNIT, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME
    Publication number: 20230207262
    Abstract: A substrate treating apparatus includes a process treating unit providing a treating space for treating a substrate and a plasma generation unit provided above the process treating unit and generating a plasma from a process gas. The plasma generation unit includes a plasma chamber having a discharge space formed therein, an antenna surrounding an outside of the plasma chamber and flowing a high frequency current therethrough, and a cover member surrounding an outside of the antenna, and wherein the cover member is grounded.
    Type: Application
    Filed: March 31, 2022
    Publication date: June 29, 2023
    Inventors: Jong Woo Park, Sung Jin Yoon, A Ram Kim, Soo Yeong Yang, Ji Seung Kim, Yu Jin Jang