Patents by Inventor Soochan Oh

Soochan Oh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20240149314
    Abstract: Provided is a substrate processing apparatus configured to process a substrate having a notch including a plurality of rollers contacting a circumference of the substrate and configured to rotate the substrate, a first sensor configured to sense an impact between the plurality of rollers and the substrate, and a signal processing unit configured to detect revolutions per unit time of the substrate, based on a first sensing signal output by the first sensor.
    Type: Application
    Filed: June 25, 2023
    Publication date: May 9, 2024
    Inventors: Hyunwoo Noh, Kyoungwoo Kim, Youngseok Jung, Youngjin Hong, Soochan Oh, Sungwoo Shin, Namhoon Lee, Bongju Lee