Patents by Inventor Sook Ching Chang

Sook Ching Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Acoustic resonator device with air-ring and temperature compensating layer
    Patent number: 9401691
    Abstract: A bulk acoustic wave (BAW) resonator device includes a substrate defining a cavity, a bottom electrode formed over the substrate and at least a portion of the cavity, a piezoelectric layer formed on the bottom electrode, and a top electrode formed on the piezoelectric layer. An air-wing and an air-bridge are formed between the piezoelectric layer and the top electrode, the air-wing having an inner edge that defines an outer boundary of an active region of the BAW resonator device. The BAW resonator device further includes a temperature compensation feature having positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer. The temperature compensation feature extends outside the active region by a predetermined length.
    Type: Grant
    Filed: April 30, 2014
    Date of Patent: July 26, 2016
    Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
    Inventors: Qiang Zou, Chris Feng, Phil Nikkel, John Choy, Alexandre Augusto Shirakawa, Tina L. Lamers, Sook Ching Chang, Dariusz Burak
  • ACOUSTIC RESONATOR DEVICE WITH AIR-RING AND TEMPERATURE COMPENSATING LAYER
    Publication number: 20150318837
    Abstract: A bulk acoustic wave (BAW) resonator device includes a substrate defining a cavity, a bottom electrode formed over the substrate and at least a portion of the cavity, a piezoelectric layer formed on the bottom electrode, and a top electrode formed on the piezoelectric layer. An air-wing and an air-bridge are formed between the piezoelectric layer and the top electrode, the air-wing having an inner edge that defines an outer boundary of an active region of the BAW resonator device. The BAW resonator device further includes a temperature compensation feature having positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer. The temperature compensation feature extends outside the active region by a predetermined length.
    Type: Application
    Filed: April 30, 2014
    Publication date: November 5, 2015
    Inventors: Qiang Zou, Chris Feng, Phil Nikkel, John Choy, Alexandre Augusto Shirakawa, Tina L. Lamers, Sook Ching Chang, Dariusz Burak