Patents by Inventor Sooman Kim

Sooman Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF MANUFACTURING CONTAMINATION LEVEL OF ION IMPLANTING APPARATUS
    Publication number: 20150079705
    Abstract: A method of measuring a contamination level of an ion implanting apparatus is disclosed. The method may include the steps of providing a wafer, forming a first layer on the wafer, injecting impurities into the first layer, preparing an analysis sample by removing the first layer and concurrently collecting the impurities captured in the first layer from the wafer, and analyzing the analysis sample.
    Type: Application
    Filed: June 25, 2014
    Publication date: March 19, 2015
    Inventors: Sooman Kim, Wonseok Yang