Patents by Inventor Soon Chye Chan

Soon Chye Chan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer handling system for a loadlock
    Patent number: 8920097
    Abstract: A wafer handling system includes providing a loadlock tray assembly having a plurality of vertically-stacked loadlock trays; and mounting nipples around each of the plurality of vertically-stacked loadlock trays for supporting a plurality of wafers, each of the nipple having a flat top.
    Type: Grant
    Filed: November 1, 2007
    Date of Patent: December 30, 2014
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventor: Soon Chye Chan
  • WAFER HANDLING SYSTEM FOR A LOADLOCK
    Publication number: 20080107508
    Abstract: A wafer handling system includes providing a loadlock tray assembly having a plurality of vertically-stacked loadlock trays; and mounting nipples around each of the plurality of vertically-stacked loadlock trays for supporting a plurality of wafers, each of the nipples having a flat top.
    Type: Application
    Filed: November 1, 2007
    Publication date: May 8, 2008
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
    Inventor: Soon Chye Chan
  • Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool
    Patent number: 6460404
    Abstract: A solvent delivery system for an edge bead removal tool (EBR) that detects N2 leaks in a solvent pressure tank that surrounds a solvent bottle. A solvent bottle is surrounded by a pressure tank. The solvent bottle contains the solvent used in the EBR tool. A N2 gas supply is connected to the pressure tank and pressurizes the inside of the pressure tank with N2 gas. A pressure sensor is connected to the pressure tank. The pressure sensor senses the N2 pressure inside of the pressure tank. The system board notifies an operator when the pressure sensor detects an unsatisfactory N2 pressure condition inside the pressure tank. The solvent bottle contains a solvent. A buffer solvent is in the solvent buffer tank. A solvent level sensor is on the solvent buffer tank. The solvent level sensor is connected to the interlock circuit. Wherein the system board notifies an operator when the solvent level sensor detects an unsatisfactory buffer solvent level in the solvent tank.
    Type: Grant
    Filed: October 12, 2000
    Date of Patent: October 8, 2002
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Soon Chye Chan, Bak Hong Chia, Chun Pheng Tan
  • Capacitive sensor for detecting bubbles in SOG
    Publication number: 20020064604
    Abstract: A spin-on-glass delivery system has the invention's capacitive sensor to detect gas bubbles in a SOG tube. A SOG bottle is provided. The SOG bottle contains SOG. A N2 gas supply is connected to the pressure tank by a pressure tube wherein the N2 gas supply pressurizes the inside of the SOG bottle with N2 gas. The SOG bottle is connected to SOG tube. In a key feature, a capacitive sensor is mounted on the SOG tube. The capacitive sensor detects gas bubbles in the SOG flowing through the SOG tube. The SOG tube is connected to a nozzle in a SOG tool. The SOG flows through the nozzle over to a wafer. A key point of the invention is to use a capacitive sensor to detect gas bubbles in spin-on-glass flowing through a SOG tube. This is a new, unsuggested use for the capacitive sensor. The prior art bubble sensors are optical sensors.
    Type: Application
    Filed: November 30, 2000
    Publication date: May 30, 2002
    Applicant: Chartered Semiconductor Manufacturing Ltd
    Inventors: Soon Chye Chan, Bak Hong Chia