Abstract: The present invention provides a method and apparatus for cleaning parts used in substrate processing. In a method for cleaning parts of a substrate processing, plasma generated from cleaning gas is supplied together with a cooling medium to clean the parts, but the cooling medium may be provided at a lower temperature than the plasma.

Abstract: A pillow having a plurality of polygonal units, includes: a triangular pentahedron unit having a shape of a triangular prism; a one-side inclined square hexahedral unit having a shape of a square pillar; a rectangular hexahedron unit having a shape of a rectangular pillar; a both-side inclined rectangular hexahedron unit having a shape of a rectangular pillar; a rhombic hexahedron unit having a shape of a rhombic pillar; an isosceles-triangular pentahedron unit having a shape of an isosceles triangular prism; and a rectangular panel-shaped hexahedron unit having a shape of a rectangular pillar, whereby the units are sewn together in such a way so as to selectively come into surface contact with each other or be stacked, thus forming one pillow, with the respective units being filled with stuffing.

Abstract: A pillow having a plurality of polygonal units, includes: a triangular pentahedron unit having a shape of a triangular prism; a one-side inclined square hexahedral unit having a shape of a square pillar; a rectangular hexahedron unit having a shape of a rectangular pillar; a both-side inclined rectangular hexahedron unit having a shape of a rectangular pillar; a rhombic hexahedron unit having a shape of a rhombic pillar; an isosceles-triangular pentahedron unit having a shape of an isosceles triangular prism; and a rectangular panel-shaped hexahedron unit having a shape of a rectangular pillar, whereby the units are sewn together in such a way so as to selectively come into surface contact with each other or be stacked, thus forming one pillow, with the respective units being filled with stuffing.

Abstract: A method for continuously producing foamed metals is disclosed. The method comprises the steps of (i) adding a previously dissolved molten metal to a viscosity-enhancing furnace and agitating the molten metal so as to uniformly maintain the viscosity of the molten metal; (ii) conveying the molten metal to an electronic agitating type foaming furnace; (iii) injecting gas into the conveyed molten metal while agitating to obtain a foamed molten metal; and (iv) drawing the obtained foamed molten metal using a roller and cooling the drawn foamed metal.

Abstract: A method for continuously producing foamed metals is disclosed. The method comprises the steps of (i) adding a previously dissolved molten metal to a viscosity-enhancing furnace and agitating the molten metal so as to uniformly maintain the viscosity of the molten metal; (ii) conveying the molten metal to an electronic agitating type foaming furnace; (iii) injecting gas into the conveyed molten metal while agitating to obtain a foamed molten metal; and (iv) drawing the obtained foamed molten metal using a roller and cooling the drawn foamed metal.

Abstract: A method for continuously producing foamed metals is disclosed. The method comprises the steps of (i) adding a previously dissolved molten metal to a viscosity-enhancing furnace and agitating the molten metal so as to uniformly maintain the viscosity of the molten metal; (ii) conveying the molten metal to an electronic agitating type foaming furnace; (iii) injecting gas into the conveyed molten metal while agitating to obtain a foamed molten metal; and (iv) drawing the obtained foamed molten metal using a roller and cooling the drawn foamed metal.