Abstract: Semiconductor memory devices include memory cell transistors having spaced apart memory cell transistor source and drain regions, and a memory cell transistor insulated gate electrode that includes a memory cell transistor gate dielectric layer. Refresh transistors also are provided that are connected to the memory cell transistor insulated gate electrodes and are configured to selectively apply negative bias to the memory cell transistor insulated gate electrodes in a refresh operation. The refresh transistors include spaced apart refresh transistor source and drain regions, and a refresh transistor insulated gate electrode. The refresh transistor insulated gate electrode includes a refresh transistor gate dielectric layer that is of different thickness that the memory cell transistor gate dielectric layer. The refresh transistor gate dielectric layer may be thinner than the memory cell transistor gate dielectric layer.

Abstract: A method for forming a storage node contact plug of a dynamic random access memory includes forming insulating layers on an overall surface of a semiconductor substrate having a plurality of buried contact plugs, etching the insulating layers down to a top surface of the buried contact plugs to form first contact holes on the buried contact plugs, forming a photoresist pattern on the insulating layers and the first contact holes, etching the insulating layers to form second contact holes on the second insulating layer, and filling the first and second contact holes with conductive material.

Abstract: Semiconductor memory devices include memory cell transistors having spaced apart memory cell transistor source and drain regions, and a memory cell transistor insulated gate electrode that includes a memory cell transistor gate dielectric layer. Refresh transistors also are provided that are connected to the memory cell transistor insulated gate electrodes and are configured to selectively apply negative bias to the memory cell transistor insulated gate electrodes in a refresh operation. The refresh transistors include spaced apart refresh transistor source and drain regions, and a refresh transistor insulated gate electrode. The refresh transistor insulated gate electrode includes a refresh transistor gate dielectric layer that is of different thickness that the memory cell transistor gate dielectric layer. The refresh transistor gate dielectric layer may be thinner than the memory cell transistor gate dielectric layer.

Abstract: Semiconductor memory devices include memory cell transistors having spaced apart memory cell transistor source and drain regions, and a memory cell transistor insulated gate electrode that includes a memory cell transistor gate dielectric layer. Refresh transistors also are provided that are connected to the memory cell transistor insulated gate electrodes and are configured to selectively apply negative bias to the memory cell transistor insulated gate electrodes in a refresh operation. The refresh transistors include spaced apart refresh transistor source and drain regions, and a refresh transistor insulated gate electrode. The refresh transistor insulated gate electrode includes a refresh transistor gate dielectric layer that is of different thickness that the memory cell transistor gate dielectric layer. The refresh transistor gate dielectric layer may be thinner than the memory cell transistor gate dielectric layer.

Abstract: A method for forming a storage node contact plug of a dynamic random access memory includes forming insulating layers on an overall surface of a semiconductor substrate having a plurality of buried contact plugs, etching the insulating layers down to a top surface of the buried contact plugs to form first contact holes on the buried contact plugs, forming a photoresist pattern on the insulating layers and the first contact holes, etching the insulating layers to form second contact holes on the second insulating layer, and filling the first and second contact holes with conductive material.

Abstract: Semiconductor memory devices include memory cell transistors having spaced apart memory cell transistor source and drain regions, and a memory cell transistor insulated gate electrode that includes a memory cell transistor gate dielectric layer. Refresh transistors also are provided that are connected to the memory cell transistor insulated gate electrodes and are configured to selectively apply negative bias to the memory cell transistor insulated gate electrodes in a refresh operation. The refresh transistors include spaced apart refresh transistor source and drain regions, and a refresh transistor insulated gate electrode. The refresh transistor insulated gate electrode includes a refresh transistor gate dielectric layer that is of different thickness that the memory cell transistor gate dielectric layer. The refresh transistor gate dielectric layer may be thinner than the memory cell transistor gate dielectric layer.

Abstract: A method for forming a storage node contact plug of a dynamic random access memory includes forming insulating layers on an overall surface of a semiconductor substrate having a plurality of buried contact plugs, etching the insulating layers down to a top surface of the buried contact plugs to form first contact holes on the buried contact plugs, forming a photoresist pattern on the insulating layers and the first contact holes, etching the insulating layers to form second contact holes on the second insulating layer, and filling the first and second contact holes with conductive material.

Abstract: A method for forming a storage node contact plug of a dynamic random access memory includes forming insulating layers on an overall surface of a semiconductor substrate having a plurality of buried contact plugs, etching the insulating layers down to a top surface of the buried contact plugs to form first contact holes on the buried contact plugs, forming a photoresist pattern on the insulating layers and the first contact holes, etching the insulating layers to form second contact holes on the second insulating layer, and filling the first and second contact holes with conductive material.

Abstract: A method for forming a storage node contact plug of a dynamic random access memory includes forming insulating layers on an overall surface of a semiconductor substrate having a plurality of buried contact plugs, etching the insulating layers down to a top surface of the buried contact plugs to form first contact holes on the buried contact plugs, forming a photoresist pattern on the insulating layers and the first contact holes, etching the insulating layers to form second contact holes on the second insulating layer, and filling the first and second contact holes with conductive material.

Abstract: A method of forming a contact hole in a semiconductor device is provided wherein an oxide spacer is formed over a contact hole. The oxide contact hole spacer prevents an already-formed gate protecting spacer comprised of silicon nitride from being etched during a subsequent step of removing the already-formed silicon nitride etching stopper. After forming a gate stack having the protecting spacer, the silicon nitride etching stopper is formed. An interlayer insulating layer is formed thereon and a selected portion of the interlayer insulating layer is etched to form a contact hole. The oxide spacer is formed on both sidewalls of the contact hole and then the etching stopper silicon nitride layer is removed.

Abstract: A method of forming a contact hole in a semiconductor device is provided wherein an oxide spacer is formed over a contact hole. The oxide contact hole spacer prevents an already-formed gate protecting spacer comprised of silicon nitride from being etched during a subsequent step of removing the already-formed silicon nitride etching stopper. After forming a gate stack having the protecting spacer, the silicon nitride etching stopper is formed. An interlayer insulating layer is formed thereon and a selected portion of the interlayer insulating layer is etched to form a contact hole. The oxide spacer is formed on both sidewalls of the contact hole and then the etching stopper silicon nitride layer is removed.

Abstract: According to the present invention, a contact hole is formed by using a contact formation mask until portions of a first and a second impurity areas are respectively exposed, so that contact holes are formed. The size of the contact hole formed over the first impurity area (P-type impurity) is relatively larger than that of the contact hole formed over the second impurity area (N-type impurity). As a result, the size of the contact hole formed over an N-type impurity area decreases and that of the contact hole formed over a P-type impurity area increase to a corresponding degree, thereby reducing contact resistance generated on the P-type impurity area without increasing a chip size.

Abstract: According to the present invention, a contact hole is formed by using a contact formation mask until portions of a first and a second impurity areas are respectively exposed, so that contact holes are formed. The size of the contact hole formed over the first impurity area (P-type impurity) is relatively larger than that of the contact hole formed over the second impurity area (N-type impurity). As a result, the size of the contact hole formed over an N-type impurity area decreases and that of the contact hole formed over a P-type impurity area increase to a corresponding degree, thereby reducing contact resistance generated on the P-type impurity area without increasing a chip size.

Abstract: A method of forming a contact hole in a semiconductor device is provided wherein an oxide spacer is formed over a contact hole. The oxide contact hole spacer prevents an already-formed gate protecting spacer comprised of silicon nitride from being etched during a subsequent step of removing the already-formed silicon nitride etching stopper. After forming a gate stack having the protecting spacer, the silicon nitride etching stopper is formed. An interlayer insulating layer is formed thereon and a selected portion of the interlayer insulating layer is etched to form a contact hole. The oxide spacer is formed on both sidewalls of the contact hole and then the etching stopper silicon nitride layer is removed.

Abstract: Methods of forming memory device storage capacitors include the steps of forming a first electrically insulating layer on a semiconductor substrate containing active and inactive regions therein and then forming a first contact hole in the first electrically insulating layer to expose the active region. A step is also performed to form a first electrically conductive contact plug in the first contact hole and in ohmic contact with the active region. A second electrically insulating layer is then formed on the first electrically insulating layer. Next, a second contact hole is formed in the second electrically insulating layer, to expose the first electrically conductive contact plug. A second electrically conductive contact plug is then formed in the second contact hole and in ohmic contact with the first electrically conductive contact plug. A step is then performed to etch back the second electrically insulating layer to expose sidewalls of the second electrically conductive contact plug.