Patents by Inventor Soo N. Lee

Soo N. Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Black-body wafer support fixture for exposure of photoresist
    Patent number: 4046474
    Abstract: Photoresist coated transparent structures are supported in a black body (reflectionless) holder during activating exposure of the photoresist. When the photoresist coated structure is positioned in the holder, there is no reflecting surface close enough to the photoresist coated structure for photoresist-activating radiation which has once passed through the structure to be reflected back into the photoresist with sufficient intensity to expose the photoresist.
    Type: Grant
    Filed: November 17, 1975
    Date of Patent: September 6, 1977
    Assignee: Rockwell International Corporation
    Inventor: Soo N. Lee